Journal of vacuum science & technology. A. Vacuum, surfaces, and films

Label

• Journal of vacuum science & technology. A. Vacuum, surfaces, and films (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Plasma deposition chemistry of amorphous silicon-carbon alloys from fluorinated gas (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION ON THE CHEMICAL-STRUCTURE OF AMORPHOUS-SILICON NITRIDE (a-SINX) (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Optical and structural properties of low thickness lead zirconate titanate films on sapphire substrates prepared via sol-gel method (Articolo in rivista) (Prodotto della ricerca)
• Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistors (Articolo in rivista) (Prodotto della ricerca)
• Microcrystalline silicon by plasma enhanced chemical vapor deposition from silicon tetrafluoride (Articolo in rivista) (Prodotto della ricerca)
• Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity (Articolo in rivista) (Prodotto della ricerca)
• Design and test of magnetic shields for turbomolecular pumps (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Influence of the deposition parameters on the electronic and structural properties of pulsed laser ablation prepared Si1-xCx thin films (Articolo in rivista) (Prodotto della ricerca)
• Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity (Articolo in rivista) (Prodotto della ricerca)
• Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Design and test of magnetic shields for quadrupole mass spectrometers (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• X-RAY-INDUCED REDUCTION EFFECTS AT CEO2 SURFACES - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY (Articolo in rivista) (Prodotto della ricerca)
• Problems of determining true equilibrium pressures of hydrogen getters over a wide range of getter temperature and hydrogen sorption (Articolo in rivista) (Prodotto della ricerca)
• Tailored synthesis of ZnO:Er(III) nanosystems by an hybrid RF-sputtering/Sol-Gel route (Articolo in rivista) (Prodotto della ricerca)
• Influence of surface oxygen on chemoresistance of tin oxide film (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)

Alternative label

• J. vac. sci. technol., A, Vac. surf. films (literal)
• Journal of vacuum science & technology. A, Vacuum, surfaces, and films : (literal)

Language

• eng (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#issn

• 0734-2101 (literal)

Preferred label

• Journal of vacuum science & technology. A. Vacuum, surfaces, and films (literal)

Publisher

• Published for the Society by the American Institute of Physics, New York USA (literal)

Incoming links:

Rivista

• Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistors (Articolo in rivista) (Prodotto della ricerca)
• Design and test of magnetic shields for turbomolecular pumps (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity (Articolo in rivista) (Prodotto della ricerca)
• Design and test of magnetic shields for quadrupole mass spectrometers (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Influence of the deposition parameters on the electronic and structural properties of pulsed laser ablation prepared Si1-xCx thin films (Articolo in rivista) (Prodotto della ricerca)
• Tailored synthesis of ZnO:Er(III) nanosystems by an hybrid RF-sputtering/Sol-Gel route (Articolo in rivista) (Prodotto della ricerca)
• Problems of determining true equilibrium pressures of hydrogen getters over a wide range of getter temperature and hydrogen sorption (Articolo in rivista) (Prodotto della ricerca)
• Optical and structural properties of low thickness lead zirconate titanate films on sapphire substrates prepared via sol-gel method (Articolo in rivista) (Prodotto della ricerca)
• Microcrystalline silicon by plasma enhanced chemical vapor deposition from silicon tetrafluoride (Articolo in rivista) (Prodotto della ricerca)
• X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION ON THE CHEMICAL-STRUCTURE OF AMORPHOUS-SILICON NITRIDE (a-SINX) (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Plasma deposition chemistry of amorphous silicon-carbon alloys from fluorinated gas (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• X-RAY-INDUCED REDUCTION EFFECTS AT CEO2 SURFACES - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY (Articolo in rivista) (Prodotto della ricerca)
• Influence of surface oxygen on chemoresistance of tin oxide film (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity (Articolo in rivista) (Prodotto della ricerca)