Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures (Contributo in atti di convegno)

Type

• Prodotto della ricerca (Classe)
• Contributo in atti di convegno (Classe)

Label

• Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures (Contributo in atti di convegno) (literal)

Anno

• 2005-01-01T00:00:00+01:00 (literal)

Alternative label

• Ferraris E., Donà M., Cataldo A., Fassi I., De Masi B., Del Sarto M.. (2005)
  Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures
  in Micro mechanics europe - MME 2005, Göteborg, 04-06/09/2005
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Ferraris E., Donà M., Cataldo A., Fassi I., De Masi B., Del Sarto M.. (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Ferraris E., Donà M., Cataldo A., Fassi I., Istituto di Tecnologie Industriali e Automazione - Consiglio Nazionale delle Ricerche De Masi B., Del Sarto M., 2MEMS Business Unit, STMicroelectronics (literal)

Titolo

• Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures (literal)

Abstract

• Under operating conditions, several microdevices are cyclically stressed by mechanical loading. The characterization of long-term durability plays therefore a leading role in MEMS reliability. The application of fatigue test shows several difficulties. A great amount of instruments are required, like power generators, spectrum analyzers and CCD cameras. Since measurements can take several months, the parallel acquisition is also desirable. This paper addresses the development of a test-bed based on an electronic board suitable for the fatigue characterization of electrostatically actuated devices. The sample operation is monitored based on the drop in the sinusoidal current. The methodology takes advantages of electrical measurements; the use of on-chip test design can be exploited as well as the batch characterization. (literal)

Prodotto di

• Nuove applicazioni di microsistemi in componentistica avanzata (SP.P03.008.001) (Modulo)
• Tecnologie abilitanti e sistemi di automazione adattativi per fabbriche orientate alla produzione personalizzata (SP.P01.015.001) (Modulo)

Autore CNR

• ELEONORA FERRARIS (Unità di personale interno)
• ANDREA CATALDO (Persona)
• IRENE FASSI (Unità di personale interno)

Insieme di parole chiave

• Parole chiave di "Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• IRENE FASSI (Unità di personale interno)
• ANDREA CATALDO (Persona)
• ELEONORA FERRARIS (Unità di personale interno)

Prodotto

• Nuove applicazioni di microsistemi in componentistica avanzata (SP.P03.008.001) (Modulo)
• Tecnologie abilitanti e sistemi di automazione adattativi per fabbriche orientate alla produzione personalizzata (SP.P01.015.001) (Modulo)

Insieme di parole chiave di

• Parole chiave di "Development of a test-bed based on electronic board for the fatigue characterization of electrostatically actuated microstructures" (Insieme di parole chiave)