Niobium Contamination in Silicon (Contributo in atti di convegno)

Type
Label
  • Niobium Contamination in Silicon (Contributo in atti di convegno) (literal)
Anno
  • 2010-01-01T00:00:00+01:00 (literal)
Alternative label
  • Polignano ML, Codegoni D, Borionetti G, Bonoli F, Brivio J, Greco S, Marino A, Monge P, Patoprsta I, Privitera V, Riva C (2010)
    Niobium Contamination in Silicon
    in 218th ECS Meeting: E6 - High Purity Silicon 11, Las Vegas, USA
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Polignano ML, Codegoni D, Borionetti G, Bonoli F, Brivio J, Greco S, Marino A, Monge P, Patoprsta I, Privitera V, Riva C (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#descrizioneSinteticaDelProdotto
  • Among the new elements recently introduced in the silicon device fabrication, niobium [1,2] is probably the less known for what concerns its properties as a silicon contaminant. Some energy levels of niobium in silicon are reported [3], but no data are available for instance about its efficiency as a recombination center, or about the methods to be used to reveal niobium contamination. In this work, a set of experiments was carried out to investigate niobium properties as an impurity in silicon and to assess the ability of various techniques to detect niobium contamination. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1. Numonyx Via Olivetti, 2, 20040 Agrate Brianza (MB) Italy 2. MEMC Electronic Materials SpA Viale Gherzi,31 28100 Novara, Italy 3. ST Microelectronics Via Olivetti, 2, 20040 Agrate Brianza (MB) Italy 4. CNR-IMM Catania (literal)
Titolo
  • Niobium Contamination in Silicon (literal)
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