Transparent SiOxCyHz thin films by plasma enhanced-chemical vapor deposition at low temperature (Contributo in atti di convegno)

Type
Label
  • Transparent SiOxCyHz thin films by plasma enhanced-chemical vapor deposition at low temperature (Contributo in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • A. Gasparotto, D. Barreca, C. Maccato, C. Maragno, G. Rossetto, E. Tondello (2007)
    Transparent SiOxCyHz thin films by plasma enhanced-chemical vapor deposition at low temperature
    in 16th Meeting on Syntheses and Methodologies in Inorganic Chemistry, Bressanone (BZ), 2-6 Dicembre 2007
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • A. Gasparotto, D. Barreca, C. Maccato, C. Maragno, G. Rossetto, E. Tondello (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1,3,4,6: Department of Chemistry and INSTM - University of Padova - Padova, Italy 2: ISTM-CNR and INSTM - Department of Chemistry - University of Padova - Padova, Italy 5: ICIS-CNR - Padova, Italy (literal)
Titolo
  • Transparent SiOxCyHz thin films by plasma enhanced-chemical vapor deposition at low temperature (literal)
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Autore CNR

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