MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor (Contributo in atti di convegno)

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  • MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor (Contributo in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • Carta Giovanni , Rosalba Gerbasi, Gilberto Rossetto, Pierino Zanella, Marco Natali, Marco Bolzan, Omar Saoncella (2007)
    MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor
    in Sixteenth European Conference on Chemical Vapor Deposition, Scheveningen, Den Haag
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Carta Giovanni , Rosalba Gerbasi, Gilberto Rossetto, Pierino Zanella, Marco Natali, Marco Bolzan, Omar Saoncella (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note
  • The common methods used to obtain pure MgTiO3 such as sol-gel, solid state reaction, thermal decomposition of peroxide precursors and hydrothermal mechano-chemical complexation, have the drawback to require a high sintering temperature of the bulk materials (>1300°C) that prevent their use as dielectric resonators for miniaturized microwave circuits. One solution to this problem can be achieved by using the vapor phase techniques, which allow the preparation of such systems in the form of thin films with tailored properties assuring an easier integration into microelectronic devices. (literal)
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  • MgTiO3 ceramics have found a wide range of applications in electronic systems such as mobile communication, radar, and satellite broadcasting. In this work, we report preliminary results on the deposition of magnesium titanium oxide thin films grown on fused quartz and Si (001) substrates via MOCVD by using two highly volatile liquid precursors, namely titanium tetra-isopropoxide [Ti(OiPr)4] and bis-methylcyclopentadienyl magnesium [Mg(Me-Cp)2]. To the best of our knowledge, the use of Mg(Me-Cp)2 as a MOCVD precursor for the growth of magnesium titanium oxide films has never been reported to date. The thin films were analysed by X-ray diffraction (XRD) and by Rutherford Backscattering spectroscopy (RBS). (literal)
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  • CNR-ICIS, Corso Stati Uniti, 4,35127 Padova, Italy (literal)
Titolo
  • MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor (literal)
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