Synthesis and characterization of novel diaminodimethylsilane derivatives as potential CVD precursors for zirconium or zirconium/silicon nitrides (Contributo in atti di convegno)

Type
Label
  • Synthesis and characterization of novel diaminodimethylsilane derivatives as potential CVD precursors for zirconium or zirconium/silicon nitrides (Contributo in atti di convegno) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • G. Carta, F. Benetollo, G. Rossetto, P. Zanella (2003)
    Synthesis and characterization of novel diaminodimethylsilane derivatives as potential CVD precursors for zirconium or zirconium/silicon nitrides
    in Syntheses and Methodologies in Inorganic Chemistry: Trends in Nanoscience, Bressanone
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • G. Carta, F. Benetollo, G. Rossetto, P. Zanella (literal)
Titolo
  • Synthesis and characterization of novel diaminodimethylsilane derivatives as potential CVD precursors for zirconium or zirconium/silicon nitrides (literal)
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Autore CNR

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