Y2O3 thin films characterized by XPS (Articolo in rivista)

Type
Label
  • Y2O3 thin films characterized by XPS (Articolo in rivista) (literal)
Anno
  • 2001-01-01T00:00:00+01:00 (literal)
Alternative label
  • D. Barreca, G.A. Battiston, D. Berto, R. Gerbasi, E. Tondello (2001)
    Y2O3 thin films characterized by XPS
    in Surface science spectra
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • D. Barreca, G.A. Battiston, D. Berto, R. Gerbasi, E. Tondello (literal)
Pagina inizio
  • 234 (literal)
Pagina fine
  • 239 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 8 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1: ISTM-CNR and INSTM, Dipartimento C.I.M.A., Via Marzolo, 1-35131 Padova, Italy 2,3,4: ICIS-CNR, Corso Stati Uniti, 4-35127 Padova, Italy 5: Dipartimento CIMA, Universita` di Padova and INSTM, Via Loredan, 4-35131 Padova, Italy (literal)
Titolo
  • Y2O3 thin films characterized by XPS (literal)
Abstract
  • Y2O3 thin films were synthesized by Chemical Vapor Deposition (CVD) using Y(acac)3.xH2O (Hacac= 2,4-pentanedione) as precursor. This work is focused on the X-ray Photoelectron Spectroscopy (XPS) characterization of an Y2O3 thin film deposited on glass substrate at 450°C in N2+O2 atmosphere and subsequently annealed in air at 1000°C. Besides the wide scan spectrum, charge corrected binding energies for the Y3d5/2, Y3d3/2, O1s and C1s surface photoelectron signals are reported. (literal)
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