Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films (Articolo in rivista) (literal)

Anno

• 2008-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1063/1.2837179 (literal)

Alternative label

• Caliendo C. (2008)
  Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films
  in Applied physics letters
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Caliendo C. (literal)

Pagina inizio

• 033505 (literal)

Pagina fine

• 033507 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://dx.doi.org/10.1063/1.2837179 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 92 (literal)

Rivista

• Applied physics letters (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note

• American Institute of Physics (AIP). (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 3 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 3 (literal)

Note

• Scopu (literal)
• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Istituto dei Sistemi Complessi, CNR, Via del Fosso del Cavaliere 100, 00133 Roma, Italy (literal)

Titolo

• Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films (literal)

Abstract

• Highly c-axis oriented piezoelectric AlN films were sputtered on (0001) Al2O3 substrates and four gigahertz-range surface acoustic wave (SAW) electroacoustic coupling configurations were realized by conventional photolithographic process. The thermal sensitivity of each device was experimentally estimated and found in good accordance with the theoretical predictions. Eight gigahertz-range, thermally compensated SAW devices were obtained for specific AlN thickness, SAW propagation direction, and electrical boundary conditions. A theoretical analysis of the acoustic and electrical behavior of the four coupling structures is proposed to match the achievable performances of the SAW devices with the design requirements. (literal)

Prodotto di

• Crescita e funzionalità di materiali e sistemi complessi a base carbonio (MD.P02.005.001) (Modulo)

Autore CNR

• CINZIA CALIENDO (Persona)

Insieme di parole chiave

• Parole chiave di "Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• CINZIA CALIENDO (Persona)

Prodotto

• Crescita e funzionalità di materiali e sistemi complessi a base carbonio (MD.P02.005.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Applied physics letters (Rivista)

Insieme di parole chiave di

• Parole chiave di "Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films" (Insieme di parole chiave)