High dose P+ implanted 4H-SiC: miscrowave and conventional post implantation annealing at temperatures (Articolo in rivista)

Type
Label
  • High dose P+ implanted 4H-SiC: miscrowave and conventional post implantation annealing at temperatures (Articolo in rivista) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Alternative label
  • A. Nath, M.V. Rao, A. Carnera, C. Albonetti, S.B. Qadri, Y.L. Tian, R. Nipoti (2011)
    High dose P+ implanted 4H-SiC: miscrowave and conventional post implantation annealing at temperatures
    in Journal of electronic materials
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • A. Nath, M.V. Rao, A. Carnera, C. Albonetti, S.B. Qadri, Y.L. Tian, R. Nipoti (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Titolo
  • High dose P+ implanted 4H-SiC: miscrowave and conventional post implantation annealing at temperatures (literal)
Prodotto di
Autore CNR

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