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MOCVD of ZnO films from bis(ketoiminato)Zn(II) precursors: structure, morphology and optical properties (Articolo in rivista)
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- MOCVD of ZnO films from bis(ketoiminato)Zn(II) precursors: structure, morphology and optical properties (Articolo in rivista) (literal)
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- 2011-01-01T00:00:00+01:00 (literal)
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D. Bekermann, A. Ludwig, T. Toader, C. Maccato, D. Barreca, A. Gasparotto, C. Bock, A.D. Wieck, U. Kunze, E. Tondello, R.A. Fischer, A. Devi (2011)
MOCVD of ZnO films from bis(ketoiminato)Zn(II) precursors: structure, morphology and optical properties
in Chemical vapor deposition (Print)
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- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- D. Bekermann, A. Ludwig, T. Toader, C. Maccato, D. Barreca, A. Gasparotto, C. Bock, A.D. Wieck, U. Kunze, E. Tondello, R.A. Fischer, A. Devi (literal)
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- 1,11,12: Lehrstuhl fur Anorganische Chemie II, Ruhr-University Bochum 44801 Bochum (Germany)
2,8: Lehrstuhl fur Angewandte Festkorperphysik, Ruhr-University Bochum, 44801 Bochum (Germany)
3,7,9: T. Toader, Dr. C. Bock, Prof. U. Kunze, Lehrstuhl fur Werkstoffe und Nanoelektronik, Ruhr-University, Bochum 44801 Bochum, (Germany)
4,6,10: Department of Chemistry, Padova University and INSTM 35131 Padova (Italy)
5: D. Barreca, CNR-ISTM and INSTM, Department of Chemistry, Padova University 35131 Padova (Italy) (literal)
- Titolo
- MOCVD of ZnO films from bis(ketoiminato)Zn(II) precursors: structure, morphology and optical properties (literal)
- Abstract
- Two closely related bis(ketoiminato) zinc precursors, which are air stable and possess favorable properties for metal-organic (MO)CVD, are successfully employed for the growth of ZnO films on silicon and borosilicate glass substrates at temperatures between 400 and 700°C. The as-deposited films are investigated by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), nuclear reaction analysis
(NRA), as well as by UV-vis absorption spectroscopy and photoluminescence (PL) measurements. The structure, morphology, and composition of the as-grown films show a strong dependence on the substrate temperature. The formation of pure and (001)-oriented wurtzite-type stoichiometric ZnO is observed. PL measurements are performed both at room temperature and 77 K, revealing a defect-free emission of ZnO films. (literal)
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