Synthesis and characterisation of zirconium-amido guanidinato complex: a potential precursor for ZrO2 thin films (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Synthesis and characterisation of zirconium-amido guanidinato complex: a potential precursor for ZrO2 thin films (Articolo in rivista) (literal)

Anno

• 2007-01-01T00:00:00+01:00 (literal)

Alternative label

• A. Devi, R. Bhakta, A. Milanov, M. Hellwig, D. Barreca, E. Tondello, R. Thomas, P. Ehrhart, M. Winter, R. Fischer (2007)
  Synthesis and characterisation of zirconium-amido guanidinato complex: a potential precursor for ZrO2 thin films
  in Dalton transactions (2003. Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• A. Devi, R. Bhakta, A. Milanov, M. Hellwig, D. Barreca, E. Tondello, R. Thomas, P. Ehrhart, M. Winter, R. Fischer (literal)

Pagina inizio

• 1671 (literal)

Pagina fine

• 1676 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• Selezionato per la Cover Page (Dalton Transactions, 2007, 1641) (literal)

Rivista

• Dalton transactions (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 6 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• 1,2,3,4,9,10: Inorganic Materials Chemistry Group, Lehrstuhl fur Anorganische Chemie II, Ruhr-University Bochum, Bochum, Germany 5: ISTM-CNR and INSTM--Department of Chemistry, Padova University, Via Marzolo, 1-35131, Padova, Italy 6: Department of Chemistry, Padova University and INSTM, Via Marzolo, 1-35131, Padova, Italy 7,8: IFF--Institut fur Festkorperforschung and CNI--Center for Nanoelectronic Systems for Information Technology, Forschungszentrum Julich, D-52425, Julich, Germany (literal)

Titolo

• Synthesis and characterisation of zirconium-amido guanidinato complex: a potential precursor for ZrO2 thin films (literal)

Abstract

• A new zirconium complex, bis-(ethylmethylamido)-bis-(N,N?-diisopropyl-2-ethylmethylamidoguanidinato)- zirconium(IV) {[(NiPr)2C(NEtMe)]2Zr(NEtMe)2}, was synthesised by partial replacement of amide ligands with bidentate guanidinate ligands. The monomeric Zr complex was characterised by 1H-NMR, 13C-NMR, EI-MS, elemental analysis, and single crystal X-ray diffraction studies. The thermal properties of the compound was studied by thermogravimetric and differential thermal analysis (TG/DTA). The new Zr compound is thermally stable and can be sublimed quantitatively which renders it promising for thin film growth using vapor deposition techniques like chemical vapor deposition (CVD) and atomic layer deposition (ALD). The use of this complex for CVD of ZrO2 on Si(100) substrates was attempted in combination with oxygen as the oxidant. Stoichiometric ZrO2 films with preferred orientation at lower growth temperatures was obtained and the films were almost carbon free. The preliminary electrical characterisation of ZrO2 films showed encouraging results for possible applications in dielectric oxide structures. (literal)

Prodotto di

• Institute of molecular science and technologies (ISTM) (Istituto)
• Progettazione molecolare di nanosistemi organizzati (PM.P05.007.001) (Modulo)

Autore CNR

• DAVIDE BARRECA (Unità di personale interno)

Incoming links:

Prodotto

• Institute of molecular science and technologies (ISTM) (Istituto)
• Progettazione molecolare di nanosistemi organizzati (PM.P05.007.001) (Modulo)

Autore CNR di

• DAVIDE BARRECA (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Dalton transactions (Rivista)