Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition (Articolo in rivista)

Type
Label
  • Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition (Articolo in rivista) (literal)
Anno
  • 2004-01-01T00:00:00+01:00 (literal)
Alternative label
  • D. Barreca, E. Bontempi, L.E. Depero, C. Maragno, E. Tondello (2004)
    Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition
    in Materials Research Society symposia proceedings
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • D. Barreca, E. Bontempi, L.E. Depero, C. Maragno, E. Tondello (literal)
Pagina inizio
  • s7.8.1 (literal)
Pagina fine
  • s7.8.6 (literal)
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  • 822 (literal)
Rivista
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  • 6 (literal)
Note
  • ISI Web of Science (WOS) (literal)
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  • 1: ISTM-CNR and INSTM - Department of Chemical Sciences - Padova University - Via Marzolo, 1 - 35131 Padova, Italy 2,3: INFM and Structural Chemistry Laboratory - Department of Mechanical Engineering - Brescia University - Via Branze, 38 - 25123 Brescia, Italy 4,5: Department of Chemical Sciences and INSTM - Padova University - Via Marzolo, 1 - 35131 Padova, Italy (literal)
Titolo
  • Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition (literal)
Abstract
  • Nanocrystalline SnO2 thin films were synthesized by Chemical Vapor Deposition on Si(100) and Al2O3 substrates using bis(diethylamino)dimethylstannane(IV) [(CH3)2Sn(N(C2H5)2)2] as precursor. Film growth was performed at 400-500°C in an O2(H2O)+N2 atmosphere, with the aim of studying the effects of the synthesis conditions on the coating properties. The sample chemical composition and surface morphology were analyzed by X-ray Photoelectron Spectroscopy (XPS) and Atomic Force Microscopy (AFM), while their structural features were investigated by Glancing Incidence X-ray Diffraction (GIXRD) and X-ray Reflectivity (XRR). In this paper, the attention is focused on the interplay between film nanostructure and morphology, with particular regard to the influence of the growth surface. (literal)
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