http://www.cnr.it/ontology/cnr/individuo/prodotto/ID40404
Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation (Articolo in rivista)
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- Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation (Articolo in rivista) (literal)
- Anno
- 2010-01-01T00:00:00+01:00 (literal)
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- Barreca F.; Barletta E.; Spadaro D.; Spadaro S.; Curro' G.; Trusso S.; Neri F.; (literal)
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- Advanced and Nano Materials Research s.r.l., Messina, Italy
CNR-Istituto per i Processi Chimico-Fisici sede di Messina, Messina, Italy
Dipartimento di Fisica della Materia e Ingegneria Elettronica, Universit di Messina, Messina, Italy (literal)
- Titolo
- Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation (literal)
- Abstract
- Carbon nitride thin films have been deposited by pulsed laser ablation of graphite targets in a controlled nitrogen/argon atmosphere. The experiments were performed by irradiating the targets with the output of a KrF laser at two different laser fluences and both in a plasma regime of free expansion and of shock wave formation. The sample compositions were determined by means of X-ray photoelectron spectroscopy. A study of the C1s and N1s core level photoemission bands evidenced nitrogen atomic contents up to 26%, with respect to carbon. Raman and XPS spectroscopy results clearly indicate that there is a strong correlation between the plasma expansion dynamics and the laser fluence with the structural properties of the deposited thin films. (literal)
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