Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation (Articolo in rivista)

Type
Label
  • Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation (Articolo in rivista) (literal)
Anno
  • 2010-01-01T00:00:00+01:00 (literal)
Alternative label
  • Barreca F.; Barletta E.; Spadaro D.; Spadaro S.; Curro' G.; Trusso S.; Neri F.; (2010)
    Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation
    in Radiation effects and defects in solids (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Barreca F.; Barletta E.; Spadaro D.; Spadaro S.; Curro' G.; Trusso S.; Neri F.; (literal)
Pagina inizio
  • 809 (literal)
Pagina fine
  • 814 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 165 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Advanced and Nano Materials Research s.r.l., Messina, Italy CNR-Istituto per i Processi Chimico-Fisici sede di Messina, Messina, Italy Dipartimento di Fisica della Materia e Ingegneria Elettronica, Universit di Messina, Messina, Italy (literal)
Titolo
  • Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation (literal)
Abstract
  • Carbon nitride thin films have been deposited by pulsed laser ablation of graphite targets in a controlled nitrogen/argon atmosphere. The experiments were performed by irradiating the targets with the output of a KrF laser at two different laser fluences and both in a plasma regime of free expansion and of shock wave formation. The sample compositions were determined by means of X-ray photoelectron spectroscopy. A study of the C1s and N1s core level photoemission bands evidenced nitrogen atomic contents up to 26%, with respect to carbon. Raman and XPS spectroscopy results clearly indicate that there is a strong correlation between the plasma expansion dynamics and the laser fluence with the structural properties of the deposited thin films. (literal)
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