http://www.cnr.it/ontology/cnr/individuo/prodotto/ID40363
Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude-Lorentz model (Articolo in rivista)
- Type
- Label
- Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude-Lorentz model (Articolo in rivista) (literal)
- Anno
- 2009-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.apsusc.2009.03.064 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- D'Elia S; Scaramuzza N; Ciuchi F; Versace C; Strangi G; Bartolino R (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- IPCF UOS Cosenza
Univ Calabria, CNR, LICRYL Lab, I-87036 Arcavacata Di Rende, CS Italy
Univ Calabria, CEMIF CAL, Dept Phys, I-87036 Arcavacata Di Rende, CS Italy (literal)
- Titolo
- Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude-Lorentz model (literal)
- Abstract
- Float glass substrates covered by high quality ITO thin films (Balzers) were subjected for an hour to single
thermal treatments at different temperature between 100 8C and 600 8C. In order to study the electric
and optical properties of both annealed and not annealed ITO-covered float glasses, ellipsometry,
spectrophotometry, impedance analysis, and X-ray measurements were performed. Moreover, variable
angle spectroscopic ellipsometry provides relevant information on the electronic and optical properties
of the samples. ITO film is modeled as a dense lower layer and a surface roughness layer. The estimated
optical density for ITO and the optical density of the surface roughness ITO layer increases with the
annealing temperature. In the near-IR range, the extinction coefficient decreases while the maximum of
the absorption in the near UV range shift towards low photon energy as the annealing temperature
increases. Spectrophotometry was used to estimate the optical band-gap energy of the samples. The
thermal annealing changes strongly the structural and optical properties of ITO thin films, because
during the thermal processes, the ITO thin film absorbs oxygen from air. This oxygen absorption
decreases the oxygen vacancies therefore the defect densities in the crystalline structure of the ITO thin
films also decrease, as confirmed both by ellipsometry and X-ray measurements. (literal)
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