Formation and evolution of F nanobubbles in amorphous and crystalline Si (Articolo in rivista)

Type
Label
  • Formation and evolution of F nanobubbles in amorphous and crystalline Si (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.2969055 (literal)
Alternative label
  • Boninelli, S; Impellizzeri, G; Mirabella, S; Priolo, F; Napolitani, E; Cherkashin, N; Cristiano, F (2008)
    Formation and evolution of F nanobubbles in amorphous and crystalline Si
    in Applied physics letters; American Institute Of Physics (AIP), Melville (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Boninelli, S; Impellizzeri, G; Mirabella, S; Priolo, F; Napolitani, E; Cherkashin, N; Cristiano, F (literal)
Pagina inizio
  • 061906 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 93 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • \"[Boninelli, S.; Impellizzeri, G.; Mirabella, S.; Priolo, F.] Univ Catania, MATIS CNR, INFM, I-95123 Catania, Italy; [Boninelli, S.; Impellizzeri, G.; Mirabella, S.; Priolo, F.] Univ Catania, Dipartimento Fis & Astron, I-95123 Catania, Italy; [Napolitani, E.] Univ Padua, MATIS CNR, INFM, I-35131 Padua, Italy; [Napolitani, E.] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy; [Cherkashin, N.] CEMES CNRS, F-31055 Toulouse, France; [Cristiano, F.] CNRS, LAAS, F-31077 Toulouse, France (literal)
Titolo
  • Formation and evolution of F nanobubbles in amorphous and crystalline Si (literal)
Abstract
  • \"The formation and evolution of F-induced nanobubbles in Si was investigated. Si samples were preamorphized, implanted with F, and partially regrown by solid phase epitaxy (SPE). It is shown that nanobubbles are formed already in the amorphous side of partially regrown samples and are then incorporated in crystalline Si during SPE. The bubbles are interpreted as the result of the diffusion and coalescence of F atoms and dangling bonds already in the amorphous matrix. During high temperature annealing after SPE, F outdiffuses; correspondingly, the bubbles partially dissolve and transform from spherical- to cylinder-shaped bubbles. (C) 2008 American Institute of Physics.\" (literal)
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