Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films (Articolo in rivista) (literal)

Anno

• 2004-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1063/1.1664026 (literal)

Alternative label

• Iacona F.; Bongiorno C.; Spinella C.; Boninelli S.; Priolo F. (2004)
  Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films
  in Journal of applied physics
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Iacona F.; Bongiorno C.; Spinella C.; Boninelli S.; Priolo F. (literal)

Pagina inizio

• 3723 (literal)

Pagina fine

• 3732 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://jap.aip.org/resource/1/japiau/v95/i7/p3723_s1 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 95 (literal)

Rivista

• Journal of applied physics (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 10 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 7 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR, IMM, Sez Catania, I-95121 Catania, Italy; Univ Catania, INFM, I-95123 Catania, Italy; Univ Catania, Dipartimento Fis & Astron, I-95123 Catania, Italy (literal)

Titolo

• Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films (literal)

Abstract

• Si nanoclusters embedded in SiO2 have been produced by thermal annealing of SiOx films prepared by plasma enhanced chemical vapor deposition. The structural properties of the system have been investigated by energy filtered transmission electron microscopy (EFTEM). EFTEM has evidenced the presence of a relevant contribution of amorphous nanostructures, not detectable by using the more conventional dark field transmission electron microscopy technique. By also taking into account this contribution, an accurate quantitative description of the evolution of the samples upon thermal annealing has been accomplished. In particular, the temperatures at which the nucleation of amorphous and crystalline Si nanoclusters starts have been determined. Furthermore, the nanocluster mean radius and density have been determined as a function of the annealing temperature. Finally, the optical and the structural properties of the system have been compared, to demonstrate that the photoluminescence properties of the system depend on both the amorphous and crystalline clusters. (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• FABIO SANTO IACONA (Persona)
• FRANCESCO PRIOLO (Persona)
• CORRADO BONGIORNO (Unità di personale interno)
• ROSARIO CORRADO SPINELLA (Persona)
• SIMONA MARIA CRISTINA BONINELLI (Persona)

Insieme di parole chiave

• Keywords of "Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films" (Insieme di parole chiave)

Incoming links:

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR di

• FRANCESCO PRIOLO (Persona)
• ROSARIO CORRADO SPINELLA (Persona)
• CORRADO BONGIORNO (Unità di personale interno)
• SIMONA MARIA CRISTINA BONINELLI (Persona)
• FABIO SANTO IACONA (Persona)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Journal of applied physics (Rivista)

Insieme di parole chiave di

• Keywords of "Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films" (Insieme di parole chiave)