Observation of the nucleation kinetics of Si quantum dots on SiO2 by energy filtered transmission electron microscopy (Articolo in rivista)

Type
Label
  • Observation of the nucleation kinetics of Si quantum dots on SiO2 by energy filtered transmission electron microscopy (Articolo in rivista) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • Nicotra G., Lombardo S., Spinella, C., Ammendola G., Gerardi C., Demuro C. (2003)
    Observation of the nucleation kinetics of Si quantum dots on SiO2 by energy filtered transmission electron microscopy
    in Applied surface science
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Nicotra G., Lombardo S., Spinella, C., Ammendola G., Gerardi C., Demuro C. (literal)
Pagina inizio
  • 304 (literal)
Pagina fine
  • 308 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 205 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR, Ist Microelettron & Microsistemi, I-95121 Catania, Italy; STMicroelectronics, Cent R&D, Catania Technol Ctr, I-95121 Catania, Italy (literal)
Titolo
  • Observation of the nucleation kinetics of Si quantum dots on SiO2 by energy filtered transmission electron microscopy (literal)
Abstract
  • The formation of Si quantum dots on SiO2 by chemical vapour deposition of SiH4 is investigated by energy filtered transmission electron microscopy. It is demonstrated that this technique allows to measure size distributions down to dimensions of about 1nm. This capability allows to put in evidence some important microscopic features of the nucleation process, whose consideration is fundamental to control the Si dot size. These aspects are shown and discussed. (literal)
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Autore CNR

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