Tailoring nanostructure of ZnO thin films by plasma assisted and Au-catalyst assisted MOCVD (Articolo in rivista)

Type
Label
  • Tailoring nanostructure of ZnO thin films by plasma assisted and Au-catalyst assisted MOCVD (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.jnoncrysol.2007.09.068 (literal)
Alternative label
  • M. Losurdo, M. M. Giangregorio, G. Malandrino, P. Capezzuto, I. L. Fragala, G. Bruno (2008)
    Tailoring nanostructure of ZnO thin films by plasma assisted and Au-catalyst assisted MOCVD
    in Journal of non-crystalline solids
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • M. Losurdo, M. M. Giangregorio, G. Malandrino, P. Capezzuto, I. L. Fragala, G. Bruno (literal)
Pagina inizio
  • 2821 (literal)
Pagina fine
  • 2825 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 354 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [ 1 ] Univ Bari, IMIP, Inst Inorgan Methodol & Plasmas, CNR, I-70126 Bari, Italy [ 2 ] Univ Bari, Dept Chem, INSTM, I-70126 Bari, Italy [ 3 ] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy [ 4 ] INSTM, UdR Catania, I-95125 Catania, Italy (literal)
Titolo
  • Tailoring nanostructure of ZnO thin films by plasma assisted and Au-catalyst assisted MOCVD (literal)
Abstract
  • The structural, morphological and optical properties of ZnO thin films grown by metal organic chemical vapor deposition (MOCVD) also plasma-assisted (PA-MOCVD) and Au-catalyst assisted (Au-MOCVD) are investigated. A new precursor Zn(TTA)(2)TMED (HTTA = 2-thenoyltrifluoroacetone, TMED = N,N,N',N'- tetramethylethylendiamine) and O-2 have been used to grow film on various substrates, including Si(100), alpha-Al2O3(0001) and quartz. Spectroscopic ellipsometry is used for investigating the correlation between film nanostructure and optical properties (exciton of ZnO appears in dielectric function). It has been found that the O-2 plasma assisted growth results in highly (0001) oriented ZnO films on all investigated substrates, with better optical quality as indicated by a sharp and intense exciton in the dielectric function spectra. Conversely, highly textured and rough films are deposited by MOCVD and also using the Au-catalyst. In the latter case, coupling ZnO with Au nanoparticles used as catalyst results in an enhancement of the Au surface plasmon resonance peak at 2.2 eV (literal)
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