Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques. (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques. (Articolo in rivista) (literal)

Anno

• 2004-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/j.surfcoat.2003.10.035 (literal)

Alternative label

• P. Bruno; G. Cicala; A. M. Losacco; P. Decuzzi (2004)
  Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques.
  in Surface & coatings technology; Elsevier Sequoia, Lausanne (Svizzera)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• P. Bruno; G. Cicala; A. M. Losacco; P. Decuzzi (literal)

Pagina inizio

• 259 (literal)

Pagina fine

• 264 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• Surface and Coatings Technology Volumes 180-181, 1 March 2004, Pages 259-264 Proceedings of Symposium G on Protective Coatings and Thin Films-03, of the E-MRS 2003 Spring Conference (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 180 (literal)

Rivista

• Surface & coatings technology (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• IMIP (literal)

Titolo

• Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques. (literal)

Abstract

• The good combination of chemical and physical properties of hydrogenated amorphous carbon (a-C:H) coatings makes them suitable for tribological, biomedical and microelectronic applications. In this work, nano-indentation and nano-scratching tests have been used to determine the mechanical properties of a-C:H films produced via plasma chemical vapour deposition from CH4-Ar gas mixtures. A capacitive ion-etching reactor has been used for film deposition with a bias and a mixture composition ranging between 0 V and -400 V and 21.4% and 100%, respectively. The variation of Young's modulus (E) and hardness (H) through film thickness has been assessed by continuous multi-cycle indentations, and sub-surface maxima of approximately 150 GPa and 20 GPa have been measured, respectively. A maximum critical load (L-c) for film delamination of approximately 170 mN has been estimated by nano-scratching. A discussion on bias voltage and mixture composition effect on E, H and L-c is presented. (literal)

Editore

• Elsevier Sequoia (Editore)

Prodotto di

• Dinamica di Plasmi e Laser-Plasmi (MD.P03.027.001) (Modulo)
• Istituto di Nanotecnologia (NANOTEC) (Istituto)

Autore CNR

• GRAZIA CICALA (Unità di personale interno)

Insieme di parole chiave

• Parole chiave di "Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques." (Insieme di parole chiave)

Incoming links:

Prodotto

• Istituto di Nanotecnologia (NANOTEC) (Istituto)
• Dinamica di Plasmi e Laser-Plasmi (MD.P03.027.001) (Modulo)

Autore CNR di

• GRAZIA CICALA (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Surface & coatings technology (Rivista)

Editore di

• Elsevier Sequoia (Editore)

Insieme di parole chiave di

• Parole chiave di "Mechanical properties of PECVD hydrogenated amorphous carbon coatings via nanoindentation and nanoscratching techniques." (Insieme di parole chiave)