Deposition of zinc oxide thin films by reactive pulsed laser ablation (Articolo in rivista)

Type
Label
  • Deposition of zinc oxide thin films by reactive pulsed laser ablation (Articolo in rivista) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.apsusc.2005.07.088 (literal)
Alternative label
  • Bilkova P. ; Zemek J. ; Mitu B. ; Marotta V. ; Orlando S. (2006)
    Deposition of zinc oxide thin films by reactive pulsed laser ablation
    in Applied surface science
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Bilkova P. ; Zemek J. ; Mitu B. ; Marotta V. ; Orlando S. (literal)
Pagina inizio
  • 4604 (literal)
Pagina fine
  • 4609 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.sciencedirect.com/science/article/pii/S0169433205013863 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 252 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 13 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1 CNR-Istituto di Metodologie Inorganiche e dei Plasmi, Sezione di Potenza, Zona Industriale, I-85050 Tito Scalo (PZ), Italy 2 Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, CZ-182 21 Praha 8, Czech Republic c National Institute for Lasers, Plasma and Radiation Physics, P.O. Box MG 36 Magurele, Bucharest 77125, Romania (literal)
Titolo
  • Deposition of zinc oxide thin films by reactive pulsed laser ablation (literal)
Abstract
  • Thin films of zinc oxide have been deposited by reactive pulsed laser ablation of Zn and ZnO targets in presence of a radio frequency (RF) generated oxygen plasma. The gaseous species have been deposited at several substrate temperatures, using the on-axis configuration, on Si (1 0 0). Thin films have been characterized by scanning electron microscopy, atomic force microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and infrared spectroscopy. A comparison among conventional PLD and reactive RF plasma-assisted PLD has been performed. (literal)
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