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Optical and electrical characterization of n-GaAs surfaces passivated by N2-H2 plasma (Articolo in rivista)
- Type
- Label
- Optical and electrical characterization of n-GaAs surfaces passivated by N2-H2 plasma (Articolo in rivista) (literal)
- Anno
- 2003-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/S0022-2313(02)00603-8 (literal)
- Alternative label
V. Augelli, T. Ligonzo, A. Minafra, G. Perna, L. Schiavulli, V. Capozzi, M. Ambrico, M. Losurdo (2003)
Optical and electrical characterization of n-GaAs surfaces passivated by N2-H2 plasma
in Journal of luminescence
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- V. Augelli, T. Ligonzo, A. Minafra, G. Perna, L. Schiavulli, V. Capozzi, M. Ambrico, M. Losurdo (literal)
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- [ 1 ] Univ Foggia, Fac Med & Chirurg, I-71100 Foggia, Italy
[ 2 ] Univ Bari, Dipartimento Interateneo Fis, I-70126 Bari, Italy
[ 3 ] INFM, Unita Bari, I-70126 Bari, Italy
[ 4 ] CNR, Ist Metodol Inorgan & Plasmi, I-70126 Bari, Italy (literal)
- Titolo
- Optical and electrical characterization of n-GaAs surfaces passivated by N2-H2 plasma (literal)
- Abstract
- The passivation of GaAs (1 0 0)surface has been performed by using remote N2 H2 (3%in H2 )RF plasma nitridation.The samples,consisting of n-doped GaAs wafers,show photoluminescence enhancement when the nitridation time and exposure to the plasma are in a narrow temporal window,so that a very thin (about 10 (A)GaN layer is deposited on the GaAs surface.Pure N2 nitridation does not provide an ef .cient passivation,because it results in GaN layers with As and AsN x segregation at the GaN/GaAs interface.Increase of Au GaAs Schottky barrier with the insertion of GaN interlayer and improvement of current voltage characteristic have been observed.
r 2002 Elsevier Science B.V.All rights reserved.
PACS: 73.20;73.30;78.55
Keywords: GaAs;Photoluminescence;Nitridation;Schottky barrier (literal)
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