http://www.cnr.it/ontology/cnr/individuo/prodotto/ID33773
Study of the interface in n+ c-Si/p-type c-Si Heterojunctions: Role of the fluorine chemistry in the interface passivation (Articolo in rivista)
- Type
- Label
- Study of the interface in n+ c-Si/p-type c-Si Heterojunctions: Role of the fluorine chemistry in the interface passivation (Articolo in rivista) (literal)
- Anno
- 2003-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/S0040-6090(02)01214-2 (literal)
- Alternative label
M. Losurdo, A. Grimaldi, A. Sacchetti, P. Capezzuto, M. Ambrico, G. Bruno, F. Roca (2003)
Study of the interface in n+ c-Si/p-type c-Si Heterojunctions: Role of the fluorine chemistry in the interface passivation
in Thin solid films (Print)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- M. Losurdo, A. Grimaldi, A. Sacchetti, P. Capezzuto, M. Ambrico, G. Bruno, F. Roca (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- 1 ] CNR, IMIP, Inst Inorgan Methodol & Plasmas, I-70126 Bari, Italy
[ 2 ] ENEA, Ctr Ric Portici, I-80055 Portici, NA, Ital (literal)
- Titolo
- Study of the interface in n+ c-Si/p-type c-Si Heterojunctions: Role of the fluorine chemistry in the interface passivation (literal)
- Abstract
- Investigation of n p heterojunction solar cells obtained by depositing a n-type thin silicon films either amorphous or
microcrystalline on p-type c-Si is carried out.The study is focused on the improvement of the c-Si surface and emitter layer y c-Si substrate interface.The peculiarity is the use of SiF -based plasmas for the in situ dry cleaning and passivation of the c-Si surface and for the PECVD deposition of the emitter layer that can be either amorphous (a-Si:H,F )or microcrystalline (m c-Si). The use of SiF instead of the conventional SiH results in a lower hydrogen content in the film and in a reduction of the 44
interaction of the c-Si surface with hydrogen atoms.Furthermore,the dependence of the heterojunction solar cell photovoltaic parameters on the insertion of an intrinsic buffer layer between the n-type thin silicon layer and the p-type c-Si substrate is discussed.
_ 2002 Elsevier Science B.V.All rights reserved.
Keywords: Heterojunctions;Thin silicon;Buffer layer (literal)
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- Autore CNR
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