Pulsed laser ablation of MoSi2: gas phase analysis (Articolo in rivista)

Type
Label
  • Pulsed laser ablation of MoSi2: gas phase analysis (Articolo in rivista) (literal)
Anno
  • 2002-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/S0169-4332(01)00668-7 (literal)
Alternative label
  • Teghil R., D'Alessio L., Santagata A., Zaccagnino M., Ferro D. (2002)
    Pulsed laser ablation of MoSi2: gas phase analysis
    in Applied surface science; ELSEVIER SCIENCE BV, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS, AMSTERDAM (Paesi Bassi)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Teghil R., D'Alessio L., Santagata A., Zaccagnino M., Ferro D. (literal)
Pagina inizio
  • 335 (literal)
Pagina fine
  • 338 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.sciencedirect.com/science/article/pii/S0169433201006687 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 186 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 1-4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Dipartimento di Chimica, Università della Basilicata, Via N. Sauro 85, 85100 Potenza, Italy CNR Centro per la Termodinamica Chimica alle Alte Temperature, Ple A. Moro 5, 00185 Rome, Italy (literal)
Titolo
  • Pulsed laser ablation of MoSi2: gas phase analysis (literal)
Abstract
  • The gaseous phase produced by laser ablation of a molybdenum silicide target has been analysed by time-of-flight mass spectrometry, emission spectroscopy and fast imaging performed by an ICCD camera, in order to obtain informations about the mechanisms involved in the laser deposition of MoSi2 thin films. During laser ablation, the emission spectra indicate a target temperature of about 7200 K, while the mass spectra evidence the presence of clusters corresponding to the formula (MoSi2)(n) with n up to 2. The results suggest that the possibility to deposit stoichiometric thin films is related to the composition of the plasma and, in particular to the presence of cluster with the right silicon molybdenum ratio. The presence of a large amount of clusters could be due to reactions in the plasma. (literal)
Editore
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Prodotto
Autore CNR di
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Editore di
Insieme di parole chiave di
data.CNR.it