Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates (Articolo in rivista) (literal)

Anno

• 2005-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/j.tsf.2005.01.035 (literal)

Alternative label

• Imparato, A.; Minarini, C.; Rubino, A.; Tassini, P.; Villani, F.; Della Sala, D.; Amendola, E.; Kunst, M.; Neitzert, H.C.; Bellone, S. (2005)
  Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates
  in Thin solid films (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Imparato, A.; Minarini, C.; Rubino, A.; Tassini, P.; Villani, F.; Della Sala, D.; Amendola, E.; Kunst, M.; Neitzert, H.C.; Bellone, S. (literal)

Pagina inizio

• 58 (literal)

Pagina fine

• 62 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 487 (literal)

Rivista

• Thin solid films (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note

• cit. 5 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• ENEA C.R. Portici, Portici, Napoli Italy CNR Imcb, Napoli, Italy University of Salerno, Salerno Italy (literal)

Titolo

• Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates (literal)

Abstract

• Laser crystn. of a-Si:H on PES, PET and AryLite polymer substrates is reported. For each material, the glass transition temp. Tg and the coeff. of thermal expansion were evaluated, to det. the optimum deposition and crystn. processes conditions. 1000-.ANG. Thick intrinsic amorphous Si films were deposited on the substrates by Plasma Enhanced Chem. Vapor Deposition at 120-250„a. Dehydrogenation and crystn. were obtained by high energy (10 J) XeCl pulsed excimer laser. The irradn. conditions were varied to study their influence on the elec. and optical properties of crystd. material. Structural characterization was performed by x-ray Diffraction. Increasing the radiation energy densities up to 220 mJ/cm2 crystallites sizes up to 750 .ANG. were obtained (literal)

Prodotto di

• Polimeri, compositi e nanostrutture con proprietà funzionali programmate (PM.P02.003.001) (Modulo)
• Institute for composite and biomedical materials (IMCB) (Istituto)

Autore CNR

• EUGENIO AMENDOLA (Persona)

Insieme di parole chiave

• Parole chiave di "Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates" (Insieme di parole chiave)

Incoming links:

Prodotto

• Institute for composite and biomedical materials (IMCB) (Istituto)
• Polimeri, compositi e nanostrutture con proprietà funzionali programmate (PM.P02.003.001) (Modulo)

Autore CNR di

• EUGENIO AMENDOLA (Persona)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Thin solid films (Rivista)

Insieme di parole chiave di

• Parole chiave di "Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates" (Insieme di parole chiave)