Structural and electrical characterization of silicided Ni/Au contacts formed at low temperature (<300°C) on p-type [001] silicon (Articolo in rivista)

Type
Label
  • Structural and electrical characterization of silicided Ni/Au contacts formed at low temperature (<300°C) on p-type [001] silicon (Articolo in rivista) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.3670995 (literal)
Alternative label
  • Alberti A.; Badal P.; Pellegrino G.; Santangelo A. (2011)
    Structural and electrical characterization of silicided Ni/Au contacts formed at low temperature (<300°C) on p-type [001] silicon
    in Journal of applied physics
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Alberti A.; Badal P.; Pellegrino G.; Santangelo A. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.scopus.com/inward/record.url?eid=2-s2.0-84855323108&partnerID=q2rCbXpz (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 110 (literal)
Rivista
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  • 12 (literal)
Note
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, Italy; ST Microelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, Italy (literal)
Titolo
  • Structural and electrical characterization of silicided Ni/Au contacts formed at low temperature (<300°C) on p-type [001] silicon (literal)
Abstract
  • [object Object] (literal)
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Autore CNR

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