Measurements, FEM Simulation and Spice Modeling of a Thermal Conductivity Detector (Contributo in atti di convegno)

Type
Label
  • Measurements, FEM Simulation and Spice Modeling of a Thermal Conductivity Detector (Contributo in atti di convegno) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Alternative label
  • Rastrello, F.; Placidi, P.; Scorzoni, A.; Cozzani, E.; Messina, M.; Elmi, I.; Zampolli, S.; Cardinali, G. C. (2011)
    Measurements, FEM Simulation and Spice Modeling of a Thermal Conductivity Detector
    in IEEE Instrumentation/Measurement Technology Conference, Graz, Austria, 13-16 May 2012
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Rastrello, F.; Placidi, P.; Scorzoni, A.; Cozzani, E.; Messina, M.; Elmi, I.; Zampolli, S.; Cardinali, G. C. (literal)
Pagina inizio
  • 651 (literal)
Pagina fine
  • 655 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 5 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • University of Perugia, CNR-IMM Bologna (literal)
Titolo
  • Measurements, FEM Simulation and Spice Modeling of a Thermal Conductivity Detector (literal)
Abstract
  • In this paper we present a micromachined Thermal Conductivity Detector (TCD), based on the Ultra Low Power (ULP) technology. The device has been electrically characterized with different Helium gas flows, via a microfluidic experimental setup. Extraction of global thermo-electric parameters, exploited for the development of an electro-thermal Spice model, has been performed directly from the experimental measurements and from 3-D electro-thermal FEM simulations of the device. The resulting Spice model agrees very well with the measurements, with a maximum error less than 0.22%. (literal)
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