GeO2 glass ceramic planar waveguides fabricated by RF-sputtering (Comunicazione a convegno)

Type
Label
  • GeO2 glass ceramic planar waveguides fabricated by RF-sputtering (Comunicazione a convegno) (literal)
Anno
  • 2014-01-01T00:00:00+01:00 (literal)
Alternative label
  • A. Chiasera [1], C. Macchi [2], S. Mariazzi [3], S. Valligatla [1,4,5], S. Varas [1], M. Mazzola [1], N. Bazzanella [5], L. Lunelli [6], C. Pederzolli [7], D.N. Rao [4], G.C. Righini [8], A. Somoza [9], R.S. Brusa [10], and M. Ferrari [1] (2014)
    GeO2 glass ceramic planar waveguides fabricated by RF-sputtering
    in SPIE Photonic West, "Optical Components and Materials XI", OPTO, San Francisco, California, USA, 1-6 February 2014
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • A. Chiasera [1], C. Macchi [2], S. Mariazzi [3], S. Valligatla [1,4,5], S. Varas [1], M. Mazzola [1], N. Bazzanella [5], L. Lunelli [6], C. Pederzolli [7], D.N. Rao [4], G.C. Righini [8], A. Somoza [9], R.S. Brusa [10], and M. Ferrari [1] (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [1] CNR-IFN CSMFO Lab, Via alla Cascata 56/C, Povo, 38123 Trento, Italy. [2] IFIMAT, UNCentro and CONICET, Pinto 399, B7000GHG Tandil, Argentina [3] Dipartimento di Fisica, Università di Trento and INFN, Gruppo collegato di Trento, Via Sommarive 14, I-38123 Povo, Trento, Italy [4] School of Physics, University of Hyderabad, Hyderabad 500046, India. [5] Università di Trento, Dipartimento di Fisica, via Sommarive 14, Povo, 38123 Trento,Italy. [6] Bruno Kessler Foundation and National Research Council Institute of Biophysics, via Sommarive 18, Trento Italy [7] Bruno Kessler Foundation, via Sommarive 18, Trento Italy [8] Centro Enrico Fermi [9] IFIMAT, UNCentro and CICPBA, Pinto 399, B7000GHG Tandil, Argentina [10] Dipartimento di Fisica and CNISM, Università di Trento, Via Sommarive 14, I-38123 Trento, Italy (literal)
Titolo
  • GeO2 glass ceramic planar waveguides fabricated by RF-sputtering (literal)
Abstract
  • GeO2 transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO2 laser. Different techniques like m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy were employed to evaluate the effects of CO2 laser processing on the optical and structural properties of the waveguides. The GeO2 planar waveguide after 2h of CO2 laser irradiation exhibits an increase of 0.04 in the refractive index, measured at 1542 nm. Moreover, the technique of laser annealing is demonstrated to significantly reduce propagation loss in GeO2 planar waveguides due to the reduction of the scattering. Upon irradiation of the surface the roughness decreases from 1.1 to 0.7 nm, as measured by AFM. Attenuation coefficients of 0.7 and 0.5 dB/cm at 1319 and 1542 nm, respectively, were measured after irradiation. Micro-Raman measurements evidence that the system embeds GeO2 nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 ?m thickness. (literal)
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