Relashionship between precursor nature and NiO film properties (Contributo in atti di convegno)

Type
Label
  • Relashionship between precursor nature and NiO film properties (Contributo in atti di convegno) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Alternative label
  • S.Battiato, M.R.Catalano, R.Lo Nigro,, M.Losurdo, M.M.Giangregorio, G.Bruno, G.Malandrino (2013)
    Relashionship between precursor nature and NiO film properties
    in IX Congresso Nazionale INSTM sulla Scienza e Tecnologia dei materiali, Bari, Italia, 30/06-03/07/2013
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • S.Battiato, M.R.Catalano, R.Lo Nigro,, M.Losurdo, M.M.Giangregorio, G.Bruno, G.Malandrino (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Dipartimento di Scienze Chimiche, Università di Catania, ISTM-CNR and INSTM UdR Catania viale A.Doria 6, I-95125 Catania, Italy Institute for Microelectronics and Microsystems, IMM-CNR, Stradale Primosole 50, 95121 Catania, Italy Institute of Inorganic Methodologies and of plasmas, IMIP-CNR, and INSTM, UdR Bari, via Orabona 4 70126 Bari, Italy (literal)
Titolo
  • Relashionship between precursor nature and NiO film properties (literal)
Abstract
  • In this work, we report the fabrication of NiO films from two different nickel b-doketonate complexes as precursors for MOCVD. Volatile and thermally stable Ni complexes were prepared by the reaction of nickel acetate suspended in dicloromethane with b-diketonates (Hhfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedione and Htta=2-thenoyl-trifluoroacetone) and N-donor ligand tmeda (tmeda=N',N',N,N,-tetramethyl-ethylendiamine) to obtain respectively the complexes Ni(hfa)2tmeda and Ni(tta)2tmeda. These cpmplexes were applied as precursors in MCVD experiments directed to NiO deposition. The films grown on quartz were characterized using X-ray diffraction analysis (XRD), field emission scannng electron microscopy (FE-SEM) and atomic force microscopy (AFM). The optical proerties were determined by UV and ellipsometric measurements. (literal)
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