An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring (Contributo in atti di convegno)

Type
Label
  • An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring (Contributo in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Alternative label
  • De Stefano L, Rendina I, Rea I, Rotiroti L, De Tommasi E, Barillaro G (2007)
    An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring
    in SPIE: Optical Sensing Technology and Applications
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • De Stefano L, Rendina I, Rea I, Rotiroti L, De Tommasi E, Barillaro G (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • IMM (literal)
Titolo
  • An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring (literal)
Abstract
  • In this work, an integrated optical microsystems for the continuous detection of flammable liquids has been fabricated and characterized. The proposed system is composed of a the transducer element, which is a vertical silicon/air Bragg mirror fabricated by silicon electrochemical micromachining, sealed with a cover glass anodically bonded on its top. The device has been optically characterized in presence of liquid substances of environmental interest, such as ethanol and isopropanol. The preliminary experimental results are in good agreement with the theoretical calculations and show the possibility to use the device as an optical sensor based on the change of its reflectivity spectrum. (literal)
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