Micromachined cantilevers for chemical sensing (Contributo in atti di convegno)

Type
Label
  • Micromachined cantilevers for chemical sensing (Contributo in atti di convegno) (literal)
Anno
  • 2000-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1142/9789812792013_0061 (literal)
Alternative label
  • V. Foglietti (1), E. Cianci (1), A. Notargiacomo (1), E. Giovine (2), F. Galanello (3) (2000)
    Micromachined cantilevers for chemical sensing
    in 5th Italian Conference on Sensors and Microsystems, Univ Lecce, Lecce, ITALY, FEB 12-16, 2000
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • V. Foglietti (1), E. Cianci (1), A. Notargiacomo (1), E. Giovine (2), F. Galanello (3) (literal)
Pagina inizio
  • 345 (literal)
Pagina fine
  • 349 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Sensors and Microsystems (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1. CNR, Ist Elettron Stato Solido, Via Cineto Romano 42, I-00156 Rome, Italy 2. Unità INFM, Dip. Fisica Univ. Roma TR, Via Vasca Navale 84, I-00146 Rome, Italy 3. Dip. Elettronica Univ. Roma TR, Via Vasca Navale 84, I-00146 Rome, Italy (literal)
Titolo
  • Micromachined cantilevers for chemical sensing (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 981-02-4487-8 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autoriVolume
  • DiNatale, C; DAmico, A; Siciliano, P (literal)
Abstract
  • The aim of this paper is the description of the microfabrication procedure of cantilevers integrated on silicon chips. The particular geometry used in designing the cantilevers allows novel electronic measurements schemes which give more flexibility for detection of analytes. The geometry consists of a double rail structure which sustain the triangle shaped end of the cantilever. Furtherly particular tips integrated on the cantilever are presented which make the devices suitable for Kelvin probe microscopy. The device are fabricated using the \"bulk micromachining\" technology. An original technique has been developed in order to align a mask facing a front surface wafer with respect to a back surface pattern without the use of expensive double side mask aligner. (literal)
Editore
Prodotto di
Autore CNR

Incoming links:


Autore CNR di
Prodotto
Editore di
data.CNR.it