Characterization of a DC magnetron sputtering device (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Characterization of a DC magnetron sputtering device (Articolo in rivista) (literal)

Anno

• 2005-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1108/03321640510571282 (literal)

Alternative label

• Desideri D., M. Bagatin, M. Spolaore, V. Antoni, R. Cavazzana, E. Martines, G. Serianni, M. Zuin (2005)
  Characterization of a DC magnetron sputtering device
  in Compel
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Desideri D., M. Bagatin, M. Spolaore, V. Antoni, R. Cavazzana, E. Martines, G. Serianni, M. Zuin (literal)

Pagina inizio

• 261 (literal)

Pagina fine

• 270 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 24 (literal)

Rivista

• Compel (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Consorzio RFX - Associazione Euratom-Enea sulla Fusione, Corso Stati Uniti 4, I-35127 Padova, Italy (literal)

Titolo

• Characterization of a DC magnetron sputtering device (literal)

Abstract

• Purpose - The aim of this paper is to obtain an extensive experimental characterization of a DC magnetron sputtering device used for plasma processing of materials. Design/methodology/approach - Models and measurements are combined for an interdisciplinary characterization of a DC magnetron sputtering device. Langmuir probes are used for the plasma characterization; the magnetic field is measured by using Hall probes and the data are used to validate a magnetostatic three-dimensional numerical analysis of the device; precision mechanical measurements are done for the target erosion profile and the results are related to a simple estimation formula; a simple model is proposed for the target heating. Findings - Data on magnetic and electric fields, electron temperature and density, plasma potential and target erosion are provided. An estimation of the target heating is proposed. Finally, an application concerning thin film deposition is reported. Research limitations/implications - Measurement of the target surface temperature for the validation of the proposed target heating estimation has not been done. Originality/value - In the field of the electromagnetic processing of materials, the reported extensive device characterization is a valuable set of information for an optimized utilization of DC magnetron sputtering devices. (literal)

Prodotto di

• Institute of ionized gas (IGI) (Istituto)
• Esperimento RFX ed attività collegate (ET.P05.003.001) (Modulo)

Autore CNR

• MONICA SPOLAORE (Unità di personale interno)
• GIANLUIGI SERIANNI (Persona)
• EMILIO MARTINES (Persona)
• VANNI ANTONI (Persona)
• MATTEO ZUIN (Unità di personale interno)

Incoming links:

Prodotto

• Institute of ionized gas (IGI) (Istituto)
• Esperimento RFX ed attività collegate (ET.P05.003.001) (Modulo)

Autore CNR di

• VANNI ANTONI (Persona)
• GIANLUIGI SERIANNI (Persona)
• EMILIO MARTINES (Persona)
• MONICA SPOLAORE (Unità di personale interno)
• MATTEO ZUIN (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Compel (Rivista)