Optical spectroscopy diagnostics and thin film deposition of laser ablated rare earth-Ni2B2C plasma plumes (Articolo in rivista)

Type
Label
  • Optical spectroscopy diagnostics and thin film deposition of laser ablated rare earth-Ni2B2C plasma plumes (Articolo in rivista) (literal)
Anno
  • 2002-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/S0009-2614(01)01482-8 (literal)
Alternative label
  • Wang, X; Amoruso, S; Bruzzese, R; Spinelli, N; Tortora, A; Velotta, R; Ferdeghini, C; Grassano, G; Ramadan, W (2002)
    Optical spectroscopy diagnostics and thin film deposition of laser ablated rare earth-Ni2B2C plasma plumes
    in Chemical physics letters (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Wang, X; Amoruso, S; Bruzzese, R; Spinelli, N; Tortora, A; Velotta, R; Ferdeghini, C; Grassano, G; Ramadan, W (literal)
Pagina inizio
  • 1 (literal)
Pagina fine
  • 6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 353 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 1-2 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Univ Naples Federico II, INFM, I-80126 Naples, Italy Univ Naples Federico II, Dipartimento Sci Fis, I-80126 Naples, Italy INFM, I-16146 Genoa, Italy Dipartimento Fis, I-16146 Genoa, Italy Univ Basilicata, Dipartimento Ingn & Fis Ambiente, I-85100 Potenza, Italy (literal)
Titolo
  • Optical spectroscopy diagnostics and thin film deposition of laser ablated rare earth-Ni2B2C plasma plumes (literal)
Abstract
  • We describe optical spectroscopy diagnostics of UV laser ablated rare earth-Ni-2-B-2-C superconducting targets. In the light of this characterization. we have optimized the parameters for high-quality thin film deposition of borocarbide compounds. Our measurements have evidenced relevant differences in the flow velocity as well as in the spatial divergence of different plasma components. This is related to the influence of the different masses of the atoms of the multicomponent target during plume expansion. These results have led us to identify the target-to-substrate distance and substrate temperature as the critical parameters for the deposition of high-quality thin films, as clearly evidenced by residual resistivity ratio measurements. (literal)
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