ZnO:Al Thin Films Deposited by RF-Magnetron Sputtering with Tunable and Uniform Properties (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• ZnO:Al Thin Films Deposited by RF-Magnetron Sputtering with Tunable and Uniform Properties (Articolo in rivista) (literal)

Anno

• 2011-01-01T00:00:00+01:00 (literal)

Alternative label

• E. Miorin, F. Montagner, S. Battiston, S. Fiameni, M. Fabrizio (2011)
  ZnO:Al Thin Films Deposited by RF-Magnetron Sputtering with Tunable and Uniform Properties
  in Journal of nanoscience and nanotechnology (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• E. Miorin, F. Montagner, S. Battiston, S. Fiameni, M. Fabrizio (literal)

Pagina inizio

• 2191 (literal)

Pagina fine

• 2195 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 11 (literal)

Rivista

• Journal of nanoscience and nanotechnology (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR-Institute for Energetics and Interphases, Corso Stati Uniti 4, 35127 Padova, Italy (literal)

Titolo

• ZnO:Al Thin Films Deposited by RF-Magnetron Sputtering with Tunable and Uniform Properties (literal)

Abstract

• Nanostructured, high quality and large area Al-doped ZnO (ZnO:Al) thin films were obtained by radiofrequency (RF) magnetron sputtering. The sample rotation during deposition has resulted in excellent spatial distribution of thickness and electro-optical properties compared to that obtained under static conditions. ZnO:Al thin films are employed in a large number of devices, including thin film solar cells, where the uniformity of the properties is a key factor for a possible up-scaling of the research results to industrially relevant substrate sizes. A chemical post etching treatment was employed achieving tunable surface nanotextures to generate light scattering at the desired wavelength for improved cell efficiency. Since the film resistivity is only slightly increased by the etching, this post-deposition step allows separating the optimization of electro-optical properties from light scattering behavior. The thin films were characterized by FE-SEM, XRD, UV-VIS spectroscopy, four probe and van der Paw techniques. (literal)

Prodotto di

• Institute of Condensed Matter Chemistry and Energy Technologies (ICMATE) (Istituto)
• Leghe metalliche e ossidi nanostrutturati per dispositivi IT-SOFC, per nanofluidi, per materiali termoelettrici e loro applicazioni industriali (ET.P06.009.001) (Modulo)

Autore CNR

• ENRICO MIORIN (Persona)
• SIMONE BATTISTON (Unità di personale interno)
• STEFANIA FIAMENI (Unità di personale interno)
• MONICA FABRIZIO (Unità di personale interno)
• FRANCESCO MONTAGNER (Persona)

Incoming links:

Prodotto

• Institute of Condensed Matter Chemistry and Energy Technologies (ICMATE) (Istituto)
• Leghe metalliche e ossidi nanostrutturati per dispositivi IT-SOFC, per nanofluidi, per materiali termoelettrici e loro applicazioni industriali (ET.P06.009.001) (Modulo)

Autore CNR di

• MONICA FABRIZIO (Unità di personale interno)
• ENRICO MIORIN (Persona)
• STEFANIA FIAMENI (Unità di personale interno)
• SIMONE BATTISTON (Unità di personale interno)
• FRANCESCO MONTAGNER (Persona)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Journal of nanoscience and nanotechnology (Rivista)