Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates (Articolo in rivista) (literal)

Anno

• 2011-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1116/1.3635366 (literal)

Alternative label

• Natali M.; Garoli D.; Rigato V.; Romanato F. (2011)
  Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates
  in Journal of vacuum science & technology. A. Vacuum, surfaces, and films
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Natali M.; Garoli D.; Rigato V.; Romanato F. (literal)

Pagina inizio

• 061505 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://avspublications.org/jvsta/resource/1/jvtad6/v29/i6/p061505_s1 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 29 (literal)

Rivista

• Journal of vacuum science & technology. A. Vacuum, surfaces, and films (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 6 (literal)

Note

• Scopu (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• 1 : ICIS-CNR, Corso Stati Uniti 4, I-35127 Padova, Italy / 2,4 : Department of Physics, University of Padova, Via Marzolo 8, I-35131 Padova, Italy / 2, 4 : TASC-INFM, Area Science Park, Basovizza S.S. 14 Km 163.5, I-34149 Trieste, Italy / 2, 4 : LaNN Laboratory for Nanofabrication of Nanodevices, Corso Stati Uniti 4, I-35127 Padova, Italy / 3 : INFN-LNL Laboratori Nazionali Legnaro, Via Dell'Università 2, I-35020 Legnaro, Italy (literal)

Titolo

• Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates (literal)

Abstract

• Lead zirconate titanate (PZT) thin films were deposited by rf magnetron sputtering on Pt/Ti/SiO 2//Si, Au/Ti/SiO2//Si, ITO//glass electrodes and on Si (100) substrates. As deposited films show large excesses of Pb and O and contain different Pb oxides. Annealing treatments in air at 650 and 750 °C carried out in a preheated muffle furnace lead to a decrease of Pb and O content and to formation of the perovskite phase via an intermediate nanocrystalline pyrochlore phase. Phase pure perovskite films are obtained on Pt and ITO electrodes by annealing at 750 °C for ~10 min, while for the same treatment significant amounts of pyrochlore remained on Au electrodes and on Si substrates. (literal)

Prodotto di

• Institute of Condensed Matter Chemistry and Energy Technologies (ICMATE) (Istituto)
• Istituto di chimica inorganica e delle superfici (ICIS) (Istituto)
• Nanodispositivi plasmonici e metamateriali (PM.P05.001.004) (Modulo)

Autore CNR

• MARCO STEFANO NATALI (Unità di personale interno)

Insieme di parole chiave

• Parole chiave di "Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates" (Insieme di parole chiave)

Incoming links:

Prodotto

• Istituto di chimica inorganica e delle superfici (ICIS) (Istituto)
• Institute of Condensed Matter Chemistry and Energy Technologies (ICMATE) (Istituto)
• Nanodispositivi plasmonici e metamateriali (PM.P05.001.004) (Modulo)

Autore CNR di

• MARCO STEFANO NATALI (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Journal of vacuum science & technology. A. Vacuum, surfaces, and films (Rivista)

Insieme di parole chiave di

• Parole chiave di "Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates" (Insieme di parole chiave)