http://www.cnr.it/ontology/cnr/individuo/prodotto/ID197531
Planar technologies for SPAD arrays with improved performances (Articolo in rivista)
- Type
- Label
- Planar technologies for SPAD arrays with improved performances (Articolo in rivista) (literal)
- Anno
- 2012-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1117/12.908648 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Gulinatti A; Panzeri F; Rech I; Maccagnani P; Ghioni M; Cova S (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- Politecn Milan, Dipartimento Elettr & Informaz, I-20133 Milan, Italy;
CNR-IMM, Sez Bologna, I-40129 Bologna, Italy;
MPD Micro Photon Devices, I-39100 Bolzano, Italy (literal)
- Titolo
- Planar technologies for SPAD arrays with improved performances (literal)
- Abstract
- In the last years many progresses have been made in the field of Silicon Single Photon Avalanche Diodes (SPAD) thanks to the improvements both in device design and in fabrication technology. For example, the use of custom fabrication processes has allowed a steadily improvement of SPAD performance in terms of active area diameter, Dark Count Rate (DCR), and Photon Detection Efficiency (PDE). Although a significant breakthrough has been achieved with the recent introduction of a new device structure capable of combining a good timing resolution with a remarkable PDE in the near infrared region, nevertheless there is still room for further improvements. In this paper we will discuss further modifications to the device structure enabling the fabrication of arrays with red enhanced photon detection efficiency. (literal)
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- Autore CNR
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