Simulation of the oxidation pathway on Si(100) using high-resolution EELS (Articolo in rivista)

Type
Label
  • Simulation of the oxidation pathway on Si(100) using high-resolution EELS (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1002/pssb.201100732 (literal)
Alternative label
  • Conor Hogan, Lucia Caramella, Giovanni Onida (2012)
    Simulation of the oxidation pathway on Si(100) using high-resolution EELS
    in Physica status solidi. B, Basic research; WILEY-V C H VERLAG GMBH, WEINHEIM (Germania)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Conor Hogan, Lucia Caramella, Giovanni Onida (literal)
Pagina inizio
  • 1132 (literal)
Pagina fine
  • 1139 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 249 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 6 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Consiglio Nazionale delle Ricerche, Istituto di Struttura della Materia (CNR-ISM), via Fosso del Cavaliere 100, 00133 Rome, Italy Dipartimento di Fisica and European Theoretical Spectroscopy Facility (ETSF), Università di Roma \"Tor Vergata\", Via della Ricerca Scientifica 1, 00133 Roma, Italy Dipartimento di Fisica and ETSF, Università degli Studi di Milano, via Celoria 16, 20133 Milano, Italy (literal)
Titolo
  • Simulation of the oxidation pathway on Si(100) using high-resolution EELS (literal)
Abstract
  • We compute high-resolution electron energy loss spectra (HREELS) of possible structural motifs that form during the dynamic oxidation process on Si(100), including the important metastable precursor silanone and an adjacent-dimer bridge (ADB) structure that may seed oxide formation. Spectroscopic fingerprints of single site, silanone, and \"seed\" structures are identified and related to changes in the surface bandstructure of the clean surface. Incorporation of oxygen into the silicon lattice through adsorption and dissociation of water is also examined. Results are compared to available HREELS spectra and surface optical data, which are closely related. Our simulations confirm that HREELS offers complementary evidence to surface optical spectroscopy, and show that its high sensitivity allows it to distinguish between energetically and structurally similar oxidation models. (literal)
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