Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system (Articolo in rivista)

Type
Label
  • Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system (Articolo in rivista) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Alternative label
  • Stomeo T, Visimberga G, Todaro MT, Passaseo A, Cingolani R, De Vittorio M, Cabrini S, Carpentiero A, Di Fabrizio E (2005)
    Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system
    in Microelectronic engineering
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Stomeo T, Visimberga G, Todaro MT, Passaseo A, Cingolani R, De Vittorio M, Cabrini S, Carpentiero A, Di Fabrizio E (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 78-79 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • INFM- NNL, INFM-TASC (literal)
Titolo
  • Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system (literal)
Abstract
  • We report on the fabrication of two-dimensional photonic crystals (2D-PC) structures by means of a focused ion beam (FIB), which is an alternative process well suited for the fast prototyping of high quality 2D-PC devices. Through FIB process the removal of materials is achieved without the use of a patterned resist mask. We have fabricated two different short in-plane cavities: the ridge geometry configuration, obtained through trenches etched down to the bottom cladding by means of a FIB process, and a second identical cavity terminated by a 2D-PC back mirror consisting of a triangular lattice of air holes in GaAs slab. Both the ridge cavity and the photonic crystal cavity have been optically characterized by detecting their edge-emitted photoluminescence. As expected, by virtue of its higher back mirror reflectivity leading to lower cavity losses, the 2D-PC cavity shows the occurrence of amplified spontaneous emission at an excitation power density three times lower than in the standard ridge cavity. (literal)
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