Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si (Articolo in rivista)

Type
Label
  • Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si (Articolo in rivista) (literal)
Anno
  • 2009-01-01T00:00:00+01:00 (literal)
Alternative label
  • D. De Salvador; G. Bisognin; E. Napolitani; M. Mastromatteo; N. Baggio; A. Carnera; F. Boscherini; G. Impellizzeri; S. Mirabella; S. Boninelli; F. Priolo; F. Cristiano (2009)
    Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si
    in Applied physics letters; American Institute of Physics, Melville [NY] (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • D. De Salvador; G. Bisognin; E. Napolitani; M. Mastromatteo; N. Baggio; A. Carnera; F. Boscherini; G. Impellizzeri; S. Mirabella; S. Boninelli; F. Priolo; F. Cristiano (literal)
Pagina inizio
  • 101908 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 95 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 3 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • MATIS INFM-CNR and Department of Physics, Padova University, via Marzolo 8, 35131 Padova, Italy; Department of Physics and CNISM, Bologna University, viale C. Berti Pichat 6/2, 40127 Bologna, Italy; MATIS INFM-CNR and Department of Physics and Astronomy, Catania University, via S. Sofia 64, 95123 Catania, Italy; LAAS-CNRS, Toulouse University, 7 av. du Colonel Roche, 31077 Toulouse, France (literal)
Titolo
  • Formation and incorporation of SiF4 molecules in F-implanted preamorphized Si (literal)
Abstract
  • The local structure of fluorine incorporated in crystalline silicon following solid phase epitaxial regrowth was investigated by means of x-ray absorption spectroscopy at the F K-edge. We clearly demonstrate that most F is found in SiF4 molecules in the crystalline matrix. A kinetic pathway, which explains our observation and which is also able to rationalize previous results in a common and coherent framework, is proposed. (literal)
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