MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor (Articolo in rivista)

Type
Label
  • MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor (Articolo in rivista) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.surfcoat.2007.03.053 (literal)
Alternative label
  • Carta Giovanni , Gerbasi Rosalba , Rossetto Gilberto , Zanella Pierino , Natali Marco, Bolzan Marco , Saoncella Omar (2007)
    MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor
    in Surface & coatings technology
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Carta Giovanni , Gerbasi Rosalba , Rossetto Gilberto , Zanella Pierino , Natali Marco, Bolzan Marco , Saoncella Omar (literal)
Pagina inizio
  • 9117 (literal)
Pagina fine
  • 9119 (literal)
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  • 201 (literal)
Rivista
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  • The MOCVD technique has revealed itself to be a valid process in which by deliberately changing the experimental process parameters it was possible to control the film composition and the resulting chemico-physical properties. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#descrizioneSinteticaDelProdotto
  • In this work the Mg(Me-Cp)2 compound was efficiently used as an unusual Mg precursor in co-deposition experiments with Ti(OiPr)4 for obtaining magnesium titanium oxide thin films. Changing the evaporated amounts of both the titanium and magnesium precursors, the input molar ratio Mg/Ti was varied from 3:1 to 1:6. While the as-grown samples at 450 °C were amorphous, polycrystalline films were obtained after annealing in air between 600 and 800 °C, temperature values which are significantly lower than those reported for bulk material sintering. In particular, when the Mg/Ti molar ratio is greater than 1:1 the Mg2TiO4 (qandilite) phase was observed, while the characteristic MgTiO3 (geikielite) reflections were detected when the input molar ratio Mg/Ti was varied from 1:1.5 to 1:4. With a higher titanium molar input, a mixture of TiO2 (anatase) and MgTiO3 (geikielite) phases was observed. In conclusion the MOCVD technique has revealed itself to be a valid process in which by deliberately changing the experimental process parameters it was possible to control the film composition and the resulting chemico-physical properties. (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-ICIS, Corso Stati Uniti 4, 35127 Padova, Italy (literal)
Titolo
  • MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor (literal)
Abstract
  • Magnesium titanium oxide thin films were deposited at 450 °C on fused quartz and Si (001) substrates by using the MOCVD technique, employing titanium tetra-isopropoxide Ti(OiPr)4 and bis-(ç5 methylcyclopentadienyl)Mg(II) [(Mg(Cp-Me)2] as metalorganic sources. The Mg (Cp-Me)2 can be considered an unusual MOCVD precursor having never been used for this purpose to date. The as grown samples, amorphous at this deposition temperature, became polycrystalline after an annealing treatment in air between 600 °C and 800 °C. The films were analyzed by XRD and RBS for a thorough characterization of their microstructure and chemical composition. The obtained results indicated the possibility to obtain the Mg2TiO4 (qandilite) or the MgTiO3 (geikielite) crystalline phases as a function of the input Mg/Ti molar ratio. (literal)
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