A novel study of the growth and resistivity of nanocrystalline Pt films obtained from Pt(acac)2 in the presence of oxygen or water vapor (Articolo in rivista)

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  • A novel study of the growth and resistivity of nanocrystalline Pt films obtained from Pt(acac)2 in the presence of oxygen or water vapor (Articolo in rivista) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1002/cvde.200404201 (literal)
Alternative label
  • G.A. Battiston; R. Gerbasi ; A. Rodriguez (2005)
    A novel study of the growth and resistivity of nanocrystalline Pt films obtained from Pt(acac)2 in the presence of oxygen or water vapor
    in Chemical vapor deposition (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • G.A. Battiston; R. Gerbasi ; A. Rodriguez (literal)
Pagina inizio
  • 130 (literal)
Pagina fine
  • 135 (literal)
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  • subject category: Materials Science, Coatings 13 citazioni in SCOPUS (literal)
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  • http://onlinelibrary.wiley.com/doi/10.1002/cvde.200404201/abstract (literal)
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  • 11 (literal)
Rivista
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  • Crystallite dimensions were particularly affected by the experimental conditions and notably varied with temperature, position along the reactor and reagent gas used. Our thin films had a resistivity that depended both on the thickness of the film and on the deposition temperature, following an inverse proportionality, except at higher temperatures. Although the decomposition of Pt(acac)2 assumed different characteristics in the presence of O2 or H2O, a universal trend crystallite size – resistivity was found for almost all the films obtained. The temperature interval investigated was very large and only the high temperatures of 300°C in O2 did not always obey the foreseen trend. This study represents an important starting point for the correlation of experimental conditions with the applicative utilisation of nanocrystalline Pt films. (literal)
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  • 3 (literal)
Note
  • Scopu (literal)
  • ISI Web of Science (WOS) (literal)
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  • Istituto di Chimica Inorganica e delle Superfici del C.N.R. Padova / Istituto di Chimica Inorganica e delle Superfici del C.N.R. Padova / La Laguna University, Inorganic Chemistry Department, La Laguna, Canary Islands / (literal)
Titolo
  • A novel study of the growth and resistivity of nanocrystalline Pt films obtained from Pt(acac)2 in the presence of oxygen or water vapor (literal)
Abstract
  • Reaction mechanisms between platinum acetylacetonate Pt(acac)2 and oxygen or water vapor for the deposition of nanostructured, conductive platinum thin films at 240-300 or 280-440 °C respectively, were studied with the aim of understanding the effects of experimental parameters on the microstructure and resistivity of the obtained films. The utilisation of water vapour during the decomposition process of Pt(acac)2 permitted the films to grow more slowly and more homogeneously along the reactor. Although the decomposition of Pt(acac)2 assumed different characteristics in the presence of O2 or H2O, a universal trend crystallite size - resistivity was found for almost all the films obtained; this represents an important starting point for the correlation of experimental conditions with applicative performances. (literal)
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