Gas phase vibrations as a tool for the characterisation of CVD precursors and processes (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Gas phase vibrations as a tool for the characterisation of CVD precursors and processes (Articolo in rivista) (literal)

Anno

• 2001-01-01T00:00:00+01:00 (literal)

Alternative label

• Battiston G.A. 1, Gerbasi R. 1 (2001)
  Gas phase vibrations as a tool for the characterisation of CVD precursors and processes
  in Chemical vapor deposition (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Battiston G.A. 1, Gerbasi R. 1 (literal)

Pagina inizio

• 225 (literal)

Pagina fine

• 229 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• The FTIR technique is used in-line with the aim of estimating precursor concentrations and, consequently, calculating partial pressures. Also it is possible to estimate the decomposition pathways of the investigated compounds. This is a basilar information for the understanding of any CVD process in any field of application. (literal)

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• 7 (5) (literal)

Rivista

• Chemical vapor deposition (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#descrizioneSinteticaDelProdotto

• Because of its versatility, and for the molecular information that the technique is able to offer, gas phase IR spectroscopy has increasingly proved to be a valid tool for the in-situ, in-line, and ex-situ analysis of CVD precursors and processes. The FTIR technique can be used in-line with the aim of estimating precursor concentrations and, consequently, calculating partial pressures. Actually we want to know the quantity of reactant that leaves the evaporator in a given time, that is the evaporation rate, and a constant evaporation rate corresponds to a value of partial pressure. In this case the IR cell is open, working under a constant flux of precursor vapor and inert gas at low pressure. By analyzing the more intense bands, it is possible to calculate the relationship between the evaporation rate and temperature. This procedure is quite simple, and has the advantage of allowing the stability of the precursor in that range of evaporation temperatures to be assessed. Two compounds, dimethyl aluminum acetylacetonate (Me2Alacac) and dimethyl aluminum isopropoxide (Me2AlOiPr), illustrate the procedure. (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• 1,2 ICIS-CNR (literal)

Titolo

• Gas phase vibrations as a tool for the characterisation of CVD precursors and processes (literal)

Abstract

• In-situ, or in-line Fourier transform infrared (FT-IR) spectroscopy can play an important role in the understanding of CVD processes, and some examples are reported. Moreover, gas phase composition analysis has been shown to be a valid tool for the characterization of precursor volatility and evaporation rate under a wide range of experimental conditions. (literal)

Prodotto di

• Istituto di chimica inorganica e delle superfici (ICIS) (Istituto)

Autore CNR

• GIOVANNI BATTISTON (Unità di personale interno)
• ROSALBA GERBASI (Unità di personale interno)

Insieme di parole chiave

• Keywords of "Gas phase vibrations as a tool for the characterisation of CVD precursors and processes" (Insieme di parole chiave)

Incoming links:

Prodotto

• Istituto di chimica inorganica e delle superfici (ICIS) (Istituto)

Autore CNR di

• ROSALBA GERBASI (Unità di personale interno)
• GIOVANNI BATTISTON (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Chemical vapor deposition (Rivista)

Insieme di parole chiave di

• Keywords of "Gas phase vibrations as a tool for the characterisation of CVD precursors and processes" (Insieme di parole chiave)