http://www.cnr.it/ontology/cnr/individuo/prodotto/ID182296

Atomistic mechanism of boron diffusion in silicon (Articolo in rivista)

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Label

Atomistic mechanism of boron diffusion in silicon (Articolo in rivista) (literal)

Anno

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Alternative label

Napolitani, Enrico (1); Impellizzeri, Giuliana (2); Mirabella, Salvatore (2); PRIOLO, FRANCESCO (2); DE SALVADOR, DAVIDE (1); BISOGNIN, GABRIELE (1); CARNERA, ALBERTO (1) (2006)
Atomistic mechanism of boron diffusion in silicon
in Physical review letters; American Physical Society (APS), College Pk (Stati Uniti d'America)
(literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

Napolitani, Enrico (1); Impellizzeri, Giuliana (2); Mirabella, Salvatore (2); PRIOLO, FRANCESCO (2); DE SALVADOR, DAVIDE (1); BISOGNIN, GABRIELE (1); CARNERA, ALBERTO (1) (literal)

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Rivista

Note

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(1) MATIS INFM-CNR - Padova University; (2) MATIS INFM-CNR - Catania University (literal)

Titolo

Abstract

B diffuses in crystalline Si by reacting with a Si self-interstitial (I) with a frequency g and so forming a fast migrating BI complex that can migrate for an average length ?. We experimentally demonstrate that both g and ? strongly depend on the free hole concentration p. At low p, g has a constant trend and ? increases with p, while at high p, g has a superlinear trend and ? decreases with p. This demonstrates that BI forms in the two regimes by interaction with neutral and double positive I, respectively, and its charge state has to change by interaction with free holes before diffusing. (literal)

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