Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films (Contributo in atti di convegno)

Type
Label
  • Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films (Contributo in atti di convegno) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Alternative label
  • Giovanni A. Battiston; Rosalba Gerbasi; Giovanni Carta; Fabio Marchetti; Melissa Paoletti; Claudio Pettinari; Agustin Rodriguez; Davide Barreca; Cinzia Maragno (2005)
    Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films
    in EUROCVD-15, Fifteenth European Conference on Chemical Vapor Deposition, Bochum, Germany, 5-9 September 2005
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Giovanni A. Battiston; Rosalba Gerbasi; Giovanni Carta; Fabio Marchetti; Melissa Paoletti; Claudio Pettinari; Agustin Rodriguez; Davide Barreca; Cinzia Maragno (literal)
Pagina inizio
  • 791 (literal)
Pagina fine
  • 798 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • EUROCVD-15, Fifteenth European Conference on Chemical Vapor Deposition, Proceedings of the International Symposium (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 2005-09 (literal)
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  • Electrochemnical Society Proceedings Volume 2005-09 (literal)
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  • ICIS, CNR, Corso Stati Uniti 4, I-35127 Padova,Italy ICIS, CNR, Corso Stati Uniti 4, I-35127 Padova, Italy ICIS, CNR, Corso Stati Uniti 4, I-35127 Padova, Italy Department of Chemical Sciences, CamerinoUniversity, via S. Agostino 1, 62032 Camerino, Italy Department of Chemical Sciences, CamerinoUniversity, via S. Agostino 1, 62032 Camerino, Italy Department of Chemical Sciences, CamerinoUniversity, via S. Agostino 1, 62032 Camerino, Italy La Laguna University, Inorganic Chemistry Department, Avda. Astrofisico, Campus de Anchieta, 38200 La Laguna, Canary Islands, Spain ISTM(CNR), Padova Section - INSTM, Department of Chemistry, Padova University, Via Marzolo, 1 - 35131 Padova, Italy Department of Chemistry and INSTM, Padova University, Via Marzolo, 1 - 35131 Padova, Italy (literal)
Titolo
  • Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 1-56677-427-6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • A. Devi, H. Parala, M.L. Hitchman, R.A. Fischer, M.D. Allendorf (literal)
Abstract
  • BST thin films are intriguing candidates for innovative applications in microelectronics.On this basis, the development of suitable synthetic routes so as to obtain BST films With controlled properties, plays an important role. In this contribution, we present preliminary investigations on BTS films obtained by MOCVD using novel second-generation Ba and Sr molecular precursors, namely (Ba(thd)2(pmdien)(Meim)) (Hthd = 2,2,6,6-tetramethyl-3,5-heptanedione; pmdien = N,N,N?,N'',N''-pentamethyldiethylenetriamine; Meim = methylimidazole) (Sr2(thd)4(imH)2(EtOH)) (imH = imidazole). Titanium tetra-isopropoxide Ti(OPr)4 was used as Ti source. The film deposition was carried out on quartz and silicon substrates at 450°C reactor temoperature and followed by annealing in air up to 800° C, aimed at tailoring the structural, compositional and morphological properties of the final films. (literal)
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