Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer (Articolo in rivista)

Type
Label
  • Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer (Articolo in rivista) (literal)
Anno
  • 2004-01-01T00:00:00+01:00 (literal)
Alternative label
  • Maddaloni P, Coppola G, de Natale P, de Nicola S, Ferraro P, Gioffre M, Iodice M Pasquale Maddaloni, Giuseppe Coppola, Paolo de Natale, Sergio de Nicola, Pietro Ferraro, Mariano Gioffre, and Mario Iodice (2004)
    Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Maddaloni P, Coppola G, de Natale P, de Nicola S, Ferraro P, Gioffre M, Iodice M Pasquale Maddaloni, Giuseppe Coppola, Paolo de Natale, Sergio de Nicola, Pietro Ferraro, Mariano Gioffre, and Mario Iodice (literal)
Pagina inizio
  • 64 (literal)
Pagina fine
  • 70 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 5458 (literal)
Titolo
  • Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer (literal)
Abstract
  • A novel broad-band telecom laser source is used to realize a lateral-shear scanning-wavelength interferometer for measuring the thickness of thin plates. We show that the wide tunability range allows to detect samples down to tens of microns with a relative uncertainty of less than 0.5% and a resolution of about 1 nm. A comparable accuracy in the thickness characterization of double-layer structures is also demonstrated. In turn, the wide tunability range needs the dispersion law of the materials to be taken into account in the model for correct thickness evaluation. (literal)
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