Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films (Articolo in rivista)

Type
Label
  • Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films (Articolo in rivista) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Alternative label
  • Battiston Giovanni A. , Gerbasi Rosalba , Carta Giovanni, Marchetti Fabio , Melissa Paoletti, Pettinari Claudio , Rodriguez Agustin ,Barreca Davide , Maragno Cinzia Battiston G.A., Gerbasi R., Carta G., Marchetti F., Paoletti M., Pettinari C., Rodriguez A., Barreca D., Maragno C. (2005)
    Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Battiston Giovanni A. , Gerbasi Rosalba , Carta Giovanni, Marchetti Fabio , Melissa Paoletti, Pettinari Claudio , Rodriguez Agustin ,Barreca Davide , Maragno Cinzia Battiston G.A., Gerbasi R., Carta G., Marchetti F., Paoletti M., Pettinari C., Rodriguez A., Barreca D., Maragno C. (literal)
Pagina inizio
  • 791 (literal)
Pagina fine
  • 798 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 9 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note
  • ISBN 1-56677-427-6 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • ICIS, CNR, Corso Stati Uniti 4, I-35127 Padova, Italy Department of Chemical Sciences, CamerinoUniversity, via S. Agostino 1, 62032 Camerino, Italy La Laguna University, Inorganic Chemistry Department, Avda. Astrofisico, Campus de Anchieta, 38200 La Laguna, Canary Islands, Spain ISTM-CNR, Padova Section and INSTM - Department of Chemistry - Padova University - Via Marzolo, 1 - 35131 Padova, Italy (literal)
Titolo
  • Novel molecular precursors for the MOCVD of Ba1-xSrxTiO3 thin films (literal)
Abstract
  • BST thin films are intriguing candidates for innovative applications in microelectronics.On this basis, the development of suitable synthetic routes so as to obtain BST films With controlled properties, plays an important role. In this contribution, we present preliminary investigations on BTS films obtained by MOCVD using novel second-generation Ba and Sr molecular precursors, namely (Ba(thd)2(pmdien)(Meim)) (Hthd = 2,2,6,6-tetramethyl-3,5-heptanedione; pmdien = N,N,N?,N'',N''-pentamethyldiethylenetriamine; Meim = methylimidazole) (Sr2(thd)4(imH)2(EtOH)) (imH = imidazole). Titanium tetra-isopropoxide Ti(OPr)4 was used as Ti source. The film deposition was carried out on quartz and silicon substrates at 450°C reactor temoperature and followed by annealing in air up to 800° C, aimed at tailoring the structural, compositional and morphological properties of the final films. (literal)
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