Er-doped nanostructured silicon films by plasma-enhanced chemical vapor deposition (Contributo in atti di convegno)

Type
Label
  • Er-doped nanostructured silicon films by plasma-enhanced chemical vapor deposition (Contributo in atti di convegno) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • M.M. Giangregorio, M.Losurdo, A.Sacchetti, P.Capezzuto, G.Bruno (2003)
    Er-doped nanostructured silicon films by plasma-enhanced chemical vapor deposition
    in ISPC 16 Taormina, Italy, June 21-27, 2003, Taormina, Italy
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • M.M. Giangregorio, M.Losurdo, A.Sacchetti, P.Capezzuto, G.Bruno (literal)
Titolo
  • Er-doped nanostructured silicon films by plasma-enhanced chemical vapor deposition (literal)
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Autore CNR

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