Surface roughness reduction in X-ray mirrors via sol-gel silica coatings (Articolo in rivista)

Type
Label
  • Surface roughness reduction in X-ray mirrors via sol-gel silica coatings (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Alternative label
  • A. Surpi, F. Poli, L. Armelao, D. Pelliccia, I. Bukreeva, D. Barreca, S. Lagomarsino (2008)
    Surface roughness reduction in X-ray mirrors via sol-gel silica coatings
    in Optics communications (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • A. Surpi, F. Poli, L. Armelao, D. Pelliccia, I. Bukreeva, D. Barreca, S. Lagomarsino (literal)
Pagina inizio
  • 3217 (literal)
Pagina fine
  • 3220 (literal)
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  • 281 (literal)
Rivista
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  • ISSN: 0030-4018 DOI: 10.1016/j.optcom.2008.01.068 (literal)
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  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
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  • 1,4,5,7: IFN-CNR, Via Cineto Romano 42, 00156 Roma, Italy 2: Department of Chemistry, University of Padova, Via Marzolo 1, 35131 Padova, Italy 3,6: ISTM-CNR and INSTM, Department of Chemistry, University of Padova, Via Marzolo 1, 35131 Padova, Italy 4: University of Roma ''La Sapienza\", P.le A. Moro 2, 00185 Roma, Italy (literal)
Titolo
  • Surface roughness reduction in X-ray mirrors via sol-gel silica coatings (literal)
Abstract
  • Surface roughness is a key point for all X-ray reflective optics, and is in general obtained through careful polishing and surface finishing. Here we propose a simple and inexpensive procedure to drastically reduce surface roughness: using sot-gel silica coatings. The motivation for this work is the improvement of X-ray mirrors obtained on Si substrate using micro-fabrication technology, where the usual polishing methods cannot be applied. Sol-gel silica layers dramatically reduce surface roughness and enhance the X-ray reflectivity up to acceptable values. The proof-of-principle presented in this paper can be further improved and applied to systems of different nature. (literal)
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