Surface topography of microstructures in lithium niobate by digital holographic microscopy (Articolo in rivista)

Type
Label
  • Surface topography of microstructures in lithium niobate by digital holographic microscopy (Articolo in rivista) (literal)
Anno
  • 2004-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1088/0957-0233/15/5/026 (literal)
Alternative label
  • De Nicola S, Ferraro P, Finizio A, Grilli S, Coppola G, Iodice M, De Natale P, Chiarini M (2004)
    Surface topography of microstructures in lithium niobate by digital holographic microscopy
    in Measurement science & technology (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • De Nicola S, Ferraro P, Finizio A, Grilli S, Coppola G, Iodice M, De Natale P, Chiarini M (literal)
Pagina inizio
  • 961 (literal)
Pagina fine
  • 968 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 15 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 5 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Istituto di Cibernetica del CNR 'E Caianiello', Via Campi Flegrei 34, 80078, Pozzuoli (NA), Italy Istituto Nazionale di Ottica Applicata, Sez. di Napoli, c/o Istituto di Cibernetica del CNR 'E Caianiello', Via Campi Flegrei 34, 80078, Pozzuoli (NA), Italy Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Napoli, Via P Castellino 111, 80131, Napoli, Italy Istituto Nazionale di Ottica Applicata, Largo E Fermi 6, 50125, Firenze, Italy Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Bologna, Via P Godetti 101, 40129, Bologna, Italy (literal)
Titolo
  • Surface topography of microstructures in lithium niobate by digital holographic microscopy (literal)
Abstract
  • We report here on the application of digital holographic microscopy as a metrological tool for the inspection and the micro-topography reconstruction of different microstructures fabricated in bulk lithium niobate by differential etching of reversed ferroelectric domain patterned crystals. These structures have a range of applications in optical ridge waveguides, alignment structures, V-grooves, micro-tips and micro-cantilever beams and precise control of the surface quality and topography is required. The technique allows us to obtain digitally a high-fidelity surface topography description of the specimen with only one image acquisition allowing us to have relatively simple and compact set-ups able to give quantitative information on object morphology. The advantages of this technique compared to traditional microscopy are discussed. (literal)
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