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MgO and CaO stabilized ZrO2 thin films obtained by Metal Organic Chemical Vapor Deposition (Articolo in rivista)

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MgO and CaO stabilized ZrO2 thin films obtained by Metal Organic Chemical Vapor Deposition (Articolo in rivista) (literal)

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Giovanni Carta; Naida El Habra; Gilberto Rossetto; Pierino Zanella; Maurizio Casarin, Davide Barreca; Cinzia Maragno; Eugenio Tondello (2007)
MgO and CaO stabilized ZrO2 thin films obtained by Metal Organic Chemical Vapor Deposition
in Surface & coatings technology; Academic Press Elsevier, Amsterdam (Paesi Bassi)
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Giovanni Carta; Naida El Habra; Gilberto Rossetto; Pierino Zanella; Maurizio Casarin, Davide Barreca; Cinzia Maragno; Eugenio Tondello (literal)

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In this work ZrO2MgO and ZrO2CaO thin films were obtained by MOCVD via co-deposition from two different metal sources and characterized by the combined use of XRD, EDXS and XPS analyses. Experiments carried out with both magnesium precursors showed that MgO-doped zirconia samples presented a fully stabilization of the cubic-fluorite phase for aMg content within the films in the range 1230 at.%, a wider range than that reported for bulk materials. As regards CaO-doped zirconia system, the complete stabilization of cubic ZrO2 was achieved with a calcium concentration in the range 1738 at.%. In future works, the attention will be devoted to a more detailed investigation of the system composition, especially for ZrO2CaO films, by means of other analytical techniques, such as Auger electron spectroscopy. Furthermore, conductivity measurements on the obtained samples to evaluate their eventual use as solid electrolytes in SOFCs are currently under investigation. (literal)

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ICIS - CNR Padova / ICIS - CNR Padova / ICIS - CNR Padova / ICIS - CNR Padova / Dip. Chimica, Università di Padova / ISTM - CNR - Padova / Dip. Chimica, Università di Padova / Dip. Chimica, Università di Padova (literal)

Titolo

MgO and CaO stabilized ZrO2 thin films obtained by Metal Organic Chemical Vapor Deposition (literal)

Abstract

Metal Organic Chemical Vapor Deposition of cubic stabilized zirconia was investigated by the addiction of the alkaline-earth oxides MgO and CaO. While Cp2ZrMe2 [(Cp=C5H5, Me=CH3)] was used as precursor for ZrO2, two different Mg compounds were tested for the MgO deposition, namely bis-(·5-methylcyclopentadienyl)Mg(II) [(Mg(Cp-Me)2] and bis-(2,2,6,6-tetramethyl-3,5-heptanedionate)(tetramethylethylenediamine) Mg(II) [Mg(tmhd)2·tmeda]. Bis-(2,2,6,6-tetramethyl-3,5-heptanedionate)(triethyleneglycoldimethylether)Ca(II) [Ca(tmhd)2·triglyme] was used for CaO growth. Depositions were carried out on fused quartz at 500 °C, yielding colorless and crack-free films well adherent to the substrates. A thorough characterization of their microstructure and chemical composition was obtained by the combined use of XRD (X-ray Diffraction), XPS (X-ray Photoelectron Spectroscopy) and EDXS (Energy Dispersive X-Ray Spectroscopy). The obtained results indicated a complete stabilization of zirconia in its cubic-fluorite phase when the magnesium and calcium content ranged from 12 to 30 at.% and from 17 to 38 at.%, respectively. (literal)

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