Interrelation between nanostructure and optical properties of oxide thin films by spectroscopic ellipsometry (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Interrelation between nanostructure and optical properties of oxide thin films by spectroscopic ellipsometry (Articolo in rivista) (literal)

Anno

• 2002-01-01T00:00:00+01:00 (literal)

Alternative label

• M. Losurdo, D. Barreca, P. Capezzuto, G. Bruno, E. Tondello (2002)
  Interrelation between nanostructure and optical properties of oxide thin films by spectroscopic ellipsometry
  in Surface & coatings technology
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• M. Losurdo, D. Barreca, P. Capezzuto, G. Bruno, E. Tondello (literal)

Pagina inizio

• 2 (literal)

Pagina fine

• 8 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 151-152 (literal)

Rivista

• Surface & coatings technology (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 7 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• 1,3,4: Centro di Studio per la Chimica dei Plasmi - CNR, Dipartimento di Chimica, Universita` di Bari, via Orabona 4, 70126 Bari, Italy 2,5: Centro di Studio sulla Stabilita` e Reattivita` dei Composti di Coordinazione - CNR, Dipartimento di Chimica Inorganica, Metallorganica ed Analitica, Universita` di Padova, via Marzolo 1, 35131 Padova, Italy (literal)

Titolo

• Interrelation between nanostructure and optical properties of oxide thin films by spectroscopic ellipsometry (literal)

Abstract

• Nanostructured thin oxide films of SnO2, V2O5 and indium tin oxide (ITO) were deposited by conventional and plasma-assisted chemical vapor deposition (CVD, PECVD) on different substrates and at different temperatures. Optical properties of the films were determined by spectroscopic ellipsometry in the energy range 1.5–5.5 eV. A parameterized analysis, based on Lorentzian oscillators combined with the Drude model, along with Bruggeman effective-medium approximation (BEMA) modeling, was used to determine the optical constants of thin films independently from the reference dielectric functions of the bulk materials. In this way, correlation between the optical properties and nanostructure of thin films could be established. In particular, in order to discuss the dependence of optical constants on grain size, SnO2 nanostructured films have been considered, using a parameterization based on a double Lorentzian oscillator. Nanocrystalline V2O5 thin films have demonstrated the correlation between optical constants (described by four Lorentzian oscillators) and crystallineyamorphous volume fractions. Finally, ITO thin film optical properties are described by a combination of a double Lorentzian oscillator with the Drude model; by this analysis, gradients in the structural and optical properties of ITO are demonstrated. (literal)

Prodotto di

• Istituto di Nanotecnologia (NANOTEC) (Istituto)
• Istituto di scienze e tecnologie molecolari (ISTM) (Istituto)
• Plasmi per la Scienza dei Materiali (MD.P03.025.001) (Modulo)

Autore CNR

• MARIA LOSURDO (Unità di personale interno)
• GIOVANNI BRUNO (Unità di personale interno)
• DAVIDE BARRECA (Persona)

Insieme di parole chiave

• Parole chiave di "Interrelation between nanostructure and optical properties of oxide thin films by spectroscopic ellipsometry" (Insieme di parole chiave)

Incoming links:

Prodotto

• Istituto di scienze e tecnologie molecolari (ISTM) (Istituto)
• Istituto di Nanotecnologia (NANOTEC) (Istituto)
• Plasmi per la Scienza dei Materiali (MD.P03.025.001) (Modulo)

Autore CNR di

• GIOVANNI BRUNO (Unità di personale interno)
• DAVIDE BARRECA (Persona)
• MARIA LOSURDO (Unità di personale interno)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Surface & coatings technology (Rivista)

Insieme di parole chiave di

• Parole chiave di "Interrelation between nanostructure and optical properties of oxide thin films by spectroscopic ellipsometry" (Insieme di parole chiave)